# Optical properties of hafnium-dioxide derived from reflection electron energy loss spectroscopy spectra

https://mdr.nims.go.jp/datasets/556a1c74-69ea-4911-a2f1-e0031d3f7125

## File

- [Optical properties of hafnium-dioxide derived from reflection electron energy loss spectroscopy spectra (1).pdf](https://mdr.nims.go.jp/filesets/5f7f6e8f-455b-4bc3-8f60-4a1ecbad31a5/download) ([Detail](https://mdr.nims.go.jp/filesets/5f7f6e8f-455b-4bc3-8f60-4a1ecbad31a5.md))

## Id

556a1c74-69ea-4911-a2f1-e0031d3f7125

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-12-06T02:11:04.393927Z

## Updated at

2024-12-07T03:30:14.410577Z

## Published at

2024-12-07T03:30:15.639557Z

## Doi

https://doi.org/10.48505/nims.5112

## First published url

https://doi.org/10.1016/j.jallcom.2024.175744

## Date published

2024-07-28

## Recorded date published

2024-11

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Optical properties of hafnium-dioxide derived from reflection electron energy
    loss spectroscopy spectra
  title_type: original
  lang: en

## Description

- description: "The optical properties of HfO2 have practical applications. As an
    important gate dielectric material with high-k dielectric, HfO2 is beneficial
    to reduce the leakage current of the complementary metal-oxide-semiconductor (CMOS)
    gate and improves the gate structure. A comparison with previous results indicates
    that the ELF peak positions of HfO2 with different crystal structures are similar,
    but the peak intensity and shape are different. The heterogenicity of the crystal
    structure of HfO2 leads to different measurement results for different samples.\r\n"
  description_type: abstract
  lang: und

## Creator

- name: J.M. Gong
  role: author
- name: X. Liu
  role: author
- name: L.H. Yang
  role: author
- name: A. Sulyok
  role: author
- name: Z. Baji
  role: author
- name: V. Kis
  role: author
- name: K. Tőkési
  role: author
- name: R.G. Zeng
  role: author
- name: G.J. Fang
  role: author
- name: J.B. Gong
  role: author
- name: X.D. Xiao
  role: author
- name: B. Da
  role: author
  orcid: https://orcid.org/0000-0002-0785-8662
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Z.J. Ding
  role: author

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: optical data
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Journal of Alloys and Compounds
  issn: '09258388'
  volume: '1005'
  article_number: '175744'

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 5f7f6e8f-455b-4bc3-8f60-4a1ecbad31a5
  filename: Optical properties of hafnium-dioxide derived from reflection electron
    energy loss spectroscopy spectra (1).pdf
  content_type: application/pdf
  size: 1826261
  md5: 5b383862c3ae641f74db753060fa7d33

## Thumbnail

fileset_id: 5f7f6e8f-455b-4bc3-8f60-4a1ecbad31a5
filename: Optical properties of hafnium-dioxide derived from reflection electron energy
  loss spectroscopy spectra (1).pdf