# Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500°C

https://mdr.nims.go.jp/datasets/54704e7f-c535-492b-840f-d3db0bddb883

## Files

- [2024 NEMS ZHANG-20240220.doc](https://mdr.nims.go.jp/filesets/ae5cafc2-2ed0-4ed9-b290-6baa0419c17b/download) ([Detail](https://mdr.nims.go.jp/filesets/ae5cafc2-2ed0-4ed9-b290-6baa0419c17b.md))

## Id

54704e7f-c535-492b-840f-d3db0bddb883

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-01-24T05:00:24.087254Z

## Updated at

2025-01-24T23:30:41.459947Z

## Published at

2025-01-24T23:30:41.538238Z

## Doi

https://doi.org/10.48505/nims.5295

## First published url

https://doi.org/10.1109/nems60219.2024.10639932

## Date published

2024-05-02

## Recorded date published

2024-5-2

## Resource type

conference_paper

## Manuscript type

authors_original

## Collection



## Title

- title: Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and
    Temperatures up to 500°C
  title_type: original
  lang: en

## Description

- description: Real-time multifunctional sensing of magnetic fields and temperatures
    with preserved performances from room temperature to 500℃ has posed a challenge
    for conventional sensing techniques. In this work, we demonstrate a smart multifunctional
    sensor based on single crystal diamond (SCD) MEMS resonators that can sense both
    magnetic fields and temperatures up to 500℃. Our strategy is to integrate a magnetostrictive
    thin film (Curie temperature >650℃) and a non-magnetic thin film on different
    SCD MEMS resonators on the same SCD chip for magnetic field sensing and temperature
    sensing, respectively. The multifunctional SCD MEMS sensor can achieve simultaneous
    sensing of temperatures and magnetic fields with high reliability up to 500℃,
    the best among all the semiconductors. The concept of SCD-MEMS based multifunctional
    sensors offers a promising solution for developing multifunctional sensors of
    magnetic sensing and temperature sensing under harsh environments.
  description_type: abstract
  lang: und

## Creator

- name: Zilong Zhang
  role: author
- name: Keyun Gu
  role: author
- name: Guo Chen
  role: author
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

## Contact agent



## Publisher

organization: IEEE

## Managing organization



## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined
- subject: magnetic sensors
  schema: not_defined

## Rights

- description: This work has been submitted to the IEEE for possible publication.
    Copyright may be transferred without notice, after which this version may no longer
    be accessible.
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular
    Systems (NEMS)
  issn: '24743755'
  start_page: 1
  end_page: 5

## Conference



## Related item



## Funding

- funder_name: Ministry of Education

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

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  filename: 2024 NEMS ZHANG-20240220.doc
  content_type: application/msword
  size: 963072
  md5: b22bd8e5950726f865471879b81476c5

## Thumbnail

fileset_id: ae5cafc2-2ed0-4ed9-b290-6baa0419c17b
filename: 2024 NEMS ZHANG-20240220.doc