# Halide Vapor Phase Epitaxy 2—Heteroepitaxial Growth of α- and ɛ-Ga2O3

https://mdr.nims.go.jp/datasets/5328de98-3a42-402f-b688-47c36fa5dc4b

## File

- [GaO-Oshima181210.pdf](https://mdr.nims.go.jp/filesets/3a8bff61-f1da-4503-851d-169e04158588/download) ([Detail](https://mdr.nims.go.jp/filesets/3a8bff61-f1da-4503-851d-169e04158588.md))
- [Figures181210.pdf](https://mdr.nims.go.jp/filesets/596bdf48-29ad-45de-addb-d6bee20fcc58/download) ([Detail](https://mdr.nims.go.jp/filesets/596bdf48-29ad-45de-addb-d6bee20fcc58.md))

## Id

5328de98-3a42-402f-b688-47c36fa5dc4b

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-01-05T05:15:07.287393Z

## Updated at

2024-01-30T01:29:29.802766Z

## Published at

2024-01-30T03:30:20.658927Z

## Doi

https://doi.org/10.48505/nims.4363

## First published url

https://link.springer.com/chapter/10.1007/978-3-030-37153-1_11

## Date published

2020-04-24

## Recorded date published



## Resource type

book

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: ハライド気相成長法２ - α- および ε-Ga2O3 のヘテロエピ成長
  title_type: alternative
  lang: ja
- title: Halide Vapor Phase Epitaxy 2—Heteroepitaxial Growth of α- and ɛ-Ga2O3
  title_type: original
  lang: en

## Description

- description: αおよびε酸化ガリウムのHVPE成長について解説する。
  description_type: abstract
  lang: eng

## Creator

- name: 大島祐一
  role: author
  orcid: https://orcid.org/0000-0001-8293-4891
  organization: National Institute for Materials Science
  department: Research Center for Functional Materials/Optical Materials Field/Optical
    Single Crystals Group
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: Springer

## Managing organization



## Keyword

- subject: Ga2O3
  schema: not_defined
- subject: HVPE
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: 'Gallium Oxide: Crystal Growth, Materials Properties, and Devices (Springer)'

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 3a8bff61-f1da-4503-851d-169e04158588
  filename: GaO-Oshima181210.pdf
  content_type: application/pdf
  size: 635176
  md5: ec36a25a3bacb030e0d66f4cbab7a643
- id: 596bdf48-29ad-45de-addb-d6bee20fcc58
  filename: Figures181210.pdf
  content_type: application/pdf
  size: 1388561
  md5: a544ad2c26b6c16b74d9c6efd790cc96

## Thumbnail

fileset_id: 596bdf48-29ad-45de-addb-d6bee20fcc58
filename: Figures181210.pdf