@misc{takayoshi2025a,
  title = {Near-vertical plasma-free HCl gas etching on (011) β-Ga<sub>2</sub>O<sub>3</sub>},
  author = {Takayoshi Oshima, Yuichi Oshima},
  publisher = {IOP Publishing},
  year = {2025-01-01},
  keywords = {Ga2O3, crystallographic etching, (011)}
}