# [MANA E-BULLETIN Vol.6 - Feature] Advanced nano-fabrication technology catalyzing discovery and innovation at MANA

https://mdr.nims.go.jp/datasets/4eb8d532-cd17-48a7-aef6-c984320ac4ab

## File

- [FEATURE_06_WPI-MANA.pdf](https://mdr.nims.go.jp/filesets/541641e7-aa0f-4dd3-97d4-83f9e71ef986/download) ([Detail](https://mdr.nims.go.jp/filesets/541641e7-aa0f-4dd3-97d4-83f9e71ef986.md))

## Id

4eb8d532-cd17-48a7-aef6-c984320ac4ab

## Local identifier

identifier: e-bulletin/00006

## Visibility

open_to_public

## State

published

## Created at

2022-06-25T14:00:44.999373Z

## Updated at

2023-12-24T15:30:34.514683Z

## Published at

2023-01-05T02:00:15.368087Z

## Doi

https://doi.org/10.48505/nims.3826

## First published url

https://www.nims.go.jp/mana/ebulletin/feature.html

## Date published

2019-03-21

## Recorded date published



## Resource type

magazine

## Manuscript type

vor

## Collection

- id: 5d6033fc-dd0f-4fb6-855a-518f812dd317
  identifier: https://mdr.nims.go.jp/pid/5d6033fc-dd0f-4fb6-855a-518f812dd317
  title: MANA E-BULLETIN

## Title

- title: "[MANA E-BULLETIN Vol.6 - Feature] Advanced nano-fabrication technology catalyzing
    discovery and innovation at MANA"
  title_type: original
  lang: en

## Description

- description: "Facilities for lithography and nanofabrication were established at
    NIMS in 2004 under the leadership of Masakazu Aono, the Director the International
    Center for Materials Nanoarchitectonics (WPI-MANA) at NIMS from 2007 to 2017.
    The facilities became a part of WPI-MANA in 2009 and are now referred to as the
    Namiki Foundry. “Researchers at NIMS and WPI-MANA are experts in materials science
    but few have experience of lithography and device fabrication,” says Toshihide
    Nabatame, Manager of the Namiki Foundry (former MANA Foundry). “So our role is
    to work with scientists in supporting their research on device fabrication.”\r\nThe
    Namiki Foundry has eight cleanroom areas in its 235m2 floor space. The areas are
    drawing and photo lithography; wet process; etching; film deposition; nano measurement;
    nano analysis; heat treatment and dicing and wiring . The Namiki Foundry staff
    prepare samples for structural observation by SEM, produce devices by electron
    beam lithography for nano-gap electrode patterning for complicated structures
    such as nano wires and nano sheets. Notably, they handle any kind of material
    including organic, inorganic, metals, insulators, magnetic, superconductors and
    composites."
  description_type: abstract
  lang: en

## Creator

- name: International Center for Materials Nanoarchitectonics (WPI-MANA)
  role: author
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: National Institute for Materials Science
ror: https://ror.org/026v1ze26

## Managing organization



## Keyword

- subject: Namiki Foundry
  schema: not_defined
- subject: Lithography
  schema: not_defined
- subject: Nanofabrication
  schema: not_defined
- subject: Characterization
  schema: not_defined
- subject: Film Deposition
  schema: not_defined

## Rights

- description: In Copyright
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: MANA E-BULLETIN
  volume: '6'

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 541641e7-aa0f-4dd3-97d4-83f9e71ef986
  filename: FEATURE_06_WPI-MANA.pdf
  content_type: application/pdf
  size: 500452
  md5: d4e7ae469e3b153bd25bed07cd06430e

## Thumbnail

fileset_id: 541641e7-aa0f-4dd3-97d4-83f9e71ef986
filename: FEATURE_06_WPI-MANA.pdf