@misc{(wpi-mana),
  title = {[MANA E-BULLETIN Vol.6 - Feature] Advanced nano-fabrication technology catalyzing discovery and innovation at MANA},
  author = {International Center for Materials Nanoarchitectonics (WPI-MANA)},
  publisher = {National Institute for Materials Science},
  year = {2019},
  keywords = {Namiki Foundry, Lithography, Nanofabrication, Characterization, Film Deposition}
}