# An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography Using Script-Controlled Focused Ion Beam/Scanning Electron Microscopy

https://mdr.nims.go.jp/datasets/4d897871-d4fb-449b-aa6e-d197891c8ba1

## File

- [An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography Using Script-Controlled Focused Ion Beam-Scanning Electron Microscopy.pdf](https://mdr.nims.go.jp/filesets/a1d1a32a-644f-42cd-ac6f-e4d95e7a99f5/download) ([Detail](https://mdr.nims.go.jp/filesets/a1d1a32a-644f-42cd-ac6f-e4d95e7a99f5.md))

## Id

4d897871-d4fb-449b-aa6e-d197891c8ba1

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-07-11T06:28:27.575331Z

## Updated at

2024-09-04T23:30:18.875028Z

## Published at

2024-09-04T23:30:19.466459Z

## Doi

https://doi.org/10.48505/nims.4588

## First published url

https://doi.org/10.1093/mam/ozae015

## Date published

2025-02-03

## Recorded date published

2025-2-3

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography
    Using Script-Controlled Focused Ion Beam/Scanning Electron Microscopy
  title_type: original
  lang: en

## Description

- description: The automatization of the atom probe tomography (APT) tip preparation
    using a focused ion beam (FIB) with a scanning electron microscopy (SEM) dual-beam
    system will certainly contribute to systematic APT research with higher throughput
    and reliability. While our previous work established a method to prepare tips
    with a specified tip curvature and taper angle automatically by using script-controlled
    FIB/SEM, the technique has been expanded to automated “site-specific” tip preparation
    in the current work. The improved procedure can automatically detect not only
    the tip shape but also the interface position in the tip, thus, the new function
    allows for control of the tip apex position, in other words, automated “site-specific”
    tip preparations are possible. The details of the automation procedure and some
    experimental demonstrations, i.e., Pt cap on Si, InGaN-based MQWs, and p-n junction
    of GaAs, are presented.
  description_type: abstract
  lang: und

## Creator

- name: Jun Uzuhashi
  role: author
  orcid: https://orcid.org/0000-0003-2023-8158
- name: Tadakatsu Ohkubo
  role: author
  orcid: https://orcid.org/0000-0003-3548-1951
- name: Kazuhiro Hono
  role: author
  orcid: https://orcid.org/0000-0001-7367-0193

## Contact agent



## Publisher

organization: Oxford University Press (OUP)

## Managing organization



## Keyword

- subject: atom probe tomography
  schema: not_defined
- subject: focused ion beam
  schema: not_defined
- subject: scanning electron microscopy
  schema: not_defined

## Rights

- description: 'This is a pre-copyedited, author-produced version of an article accepted
    for publication in Microscopy and Microanalysis following peer review. The version
    of record Uzuhashi, J., Ohkubo, T., & Hono, K. (2024). An Automated Site-Specific
    Tip Preparation Method for Atom Probe Tomography Using Script-Controlled Focused
    Ion Beam/Scanning Electron Microscopy. Microscopy and Microanalysis, ozae015 is
    available online at:  https://doi.org/10.1093/mam/ozae015'
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2024-03-05
end_date: 2024-09-05

## Journal

- title: Microscopy and Microanalysis
  issn: '14319276'

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: a1d1a32a-644f-42cd-ac6f-e4d95e7a99f5
  filename: An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography
    Using Script-Controlled Focused Ion Beam-Scanning Electron Microscopy.pdf
  content_type: application/pdf
  size: 908492
  md5: 35f2514a53731c91c2b133dea7e9197c

## Thumbnail

fileset_id: a1d1a32a-644f-42cd-ac6f-e4d95e7a99f5
filename: An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography
  Using Script-Controlled Focused Ion Beam-Scanning Electron Microscopy.pdf