# HAXPES spectra of n-type Si sub Sputtered

https://mdr.nims.go.jp/datasets/4ccca809-ce8e-4d1c-9361-ac2f93182589

## File

- [metadata.all.json](https://mdr.nims.go.jp/filesets/57ca165f-973c-4e96-8f2c-11d9b4ef2443/download) ([Detail](https://mdr.nims.go.jp/filesets/57ca165f-973c-4e96-8f2c-11d9b4ef2443.md))
- [metadata.all.yml](https://mdr.nims.go.jp/filesets/aa695a47-e424-4c54-8d60-7038e71f40e6/download) ([Detail](https://mdr.nims.go.jp/filesets/aa695a47-e424-4c54-8d60-7038e71f40e6.md))
- [metadata.schema.csv](https://mdr.nims.go.jp/filesets/1ed681cc-1d47-4113-99c6-0d9a32947d51/download) ([Detail](https://mdr.nims.go.jp/filesets/1ed681cc-1d47-4113-99c6-0d9a32947d51.md))
- [n-type_Si_sub.csv](https://mdr.nims.go.jp/filesets/4dcd2977-e8df-4677-9973-062e189ff44d/download) ([Detail](https://mdr.nims.go.jp/filesets/4dcd2977-e8df-4677-9973-062e189ff44d.md))
- [n-type_Si_sub.png](https://mdr.nims.go.jp/filesets/96a6a849-3836-483c-80ce-96c0be2ed9a2/download) ([Detail](https://mdr.nims.go.jp/filesets/96a6a849-3836-483c-80ce-96c0be2ed9a2.md))
- [n-type_Si_sub.thumb.png](https://mdr.nims.go.jp/filesets/ebd7ed80-9a1d-4c99-bbe4-f22e3231238d/download) ([Detail](https://mdr.nims.go.jp/filesets/ebd7ed80-9a1d-4c99-bbe4-f22e3231238d.md))
- [n-type_Si_sub_Si_1s.png](https://mdr.nims.go.jp/filesets/3590aad6-f2ad-40ec-a9c8-ff40626ca2fa/download) ([Detail](https://mdr.nims.go.jp/filesets/3590aad6-f2ad-40ec-a9c8-ff40626ca2fa.md))
- [n-type_Si_sub_Si_2p.png](https://mdr.nims.go.jp/filesets/7d703d2b-e2ad-4bb3-aacc-b655a100ff4f/download) ([Detail](https://mdr.nims.go.jp/filesets/7d703d2b-e2ad-4bb3-aacc-b655a100ff4f.md))
- [n-type_Si_sub_Si_2s.png](https://mdr.nims.go.jp/filesets/30c82766-075b-483d-a51a-409ad8551460/download) ([Detail](https://mdr.nims.go.jp/filesets/30c82766-075b-483d-a51a-409ad8551460.md))
- [n-type_Si_sub_VB.png](https://mdr.nims.go.jp/filesets/6dd43c2f-3cc3-421e-8889-001cb65f4781/download) ([Detail](https://mdr.nims.go.jp/filesets/6dd43c2f-3cc3-421e-8889-001cb65f4781.md))
- [n-type_Si_sub_wide.png](https://mdr.nims.go.jp/filesets/567a95c2-98d1-44dc-8177-c6cf4b825b51/download) ([Detail](https://mdr.nims.go.jp/filesets/567a95c2-98d1-44dc-8177-c6cf4b825b51.md))
- [primary.tsv](https://mdr.nims.go.jp/filesets/7f7a93ec-8257-4e3c-92ec-0c1a8ca7b20e/download) ([Detail](https://mdr.nims.go.jp/filesets/7f7a93ec-8257-4e3c-92ec-0c1a8ca7b20e.md))
- [raw_data.zip](https://mdr.nims.go.jp/filesets/3b5b21d9-1a42-4f8e-ac43-5e7f8f6eb20f/download) ([Detail](https://mdr.nims.go.jp/filesets/3b5b21d9-1a42-4f8e-ac43-5e7f8f6eb20f.md))

## Id

4ccca809-ce8e-4d1c-9361-ac2f93182589

## Local identifier

identifier: mdr-bp0002-0000004

## Visibility

open_to_public

## State

published

## Created at

2022-01-19T00:46:14.113071Z

## Updated at

2022-10-02T16:38:32.280097Z

## Published at

2022-04-28T08:39:11.273484Z

## Doi

https://doi.org/10.48505/nims.3245

## First published url



## Date published

2021-10-18

## Recorded date published

18/01/2022

## Resource type

dataset

## Manuscript type

na

## Collection

- id: a20d4579-5912-450f-a057-d65daaf07478
  identifier: https://mdr.nims.go.jp/pid/a20d4579-5912-450f-a057-d65daaf07478
  title: MDR HAXPES DB

## Title

- title: HAXPES spectra of n-type Si sub Sputtered
  title_type: original
  lang: en

## Description

- description: This dataset consists of HAXPES spectra at n-type Si sub Sputtered
    measured at SPring-8 BL46XU, and is a part of HAXPES database (MDR HAXPES DB,
    https://doi.org/10.48505/nims.3056) as a collection of MDR
  description_type: abstract
  lang: en

## Creator

- name: Industrial Application and Partnership Division, JASRI
  role: author

## Contact agent



## Publisher

organization: Industrial Application and Partnership Division, JASRI

## Managing organization



## Keyword

- subject: BL46XU
  schema: not_defined
- subject: HAXPES
  schema: not_defined
- subject: SPring-8
  schema: not_defined
- subject: collection - MDR HAXPES DB
  schema: not_defined
- subject: n-type Si sub Sputtered
  schema: not_defined

## Rights

- description: Creative Commons BY-NC-SA Attribution-NonCommercial-ShareAlike 4.0
    International
  identifier: https://creativecommons.org/licenses/by-nc-sa/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: experiment

## Embargo



## Journal



## Conference



## Related item



## Funding



## Instrument

- name: BL46XU_HAXPES

## Instrument operator



## Instrument managing organization



## Measurement method

- description: spectroscopy -- x-ray photoelectron spectroscopy

## Specimen

- name: n-type_Si_sub_Sputtered

## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



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## Thumbnail

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