@misc{jasri,
  title = {HAXPES spectra of n-type Si sub Sputtered},
  author = {Industrial Application and Partnership Division, JASRI},
  publisher = {Industrial Application and Partnership Division, JASRI},
  year = {2021},
  keywords = {BL46XU, HAXPES, SPring-8, collection - MDR HAXPES DB, n-type Si sub Sputtered}
}