# <i>In-plane</i> lattice orientation in aluminum scandium nitride epitaxial films deposited on Nb-doped SrTiO<sub>3</sub>(111) substrates via reactive magnetron sputtering

https://mdr.nims.go.jp/datasets/4ca9ea0b-6420-46cc-84d5-413fe71ee925

## File

- [Hasegawa_JCSJ-2.pdf](https://mdr.nims.go.jp/filesets/838029b1-cbe9-4f4e-9f95-3441d7544faa/download) ([Detail](https://mdr.nims.go.jp/filesets/838029b1-cbe9-4f4e-9f95-3441d7544faa.md))

## Id

4ca9ea0b-6420-46cc-84d5-413fe71ee925

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-04-11T12:37:14.052569Z

## Updated at

2025-04-14T07:30:51.853186Z

## Published at

2025-04-14T05:56:20.127881Z

## Doi



## First published url

https://doi.org/10.2109/jcersj2.23002

## Date published

2023-07-01

## Recorded date published

2023

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: "<i>In-plane</i> lattice orientation in aluminum scandium nitride
    epitaxial films deposited on Nb-doped SrTiO<sub>3</sub>(111) substrates
    via reactive magnetron sputtering"
  title_type: original
  lang: en

## Description

- description: Wurtzite-type aluminum scandium nitride (WZ-(Al1−xScx)N) thin films
    were grown on Nb 0.5wt% doped SrTiO3(111) (Nb:STO) single crystal substrates by
    radio frequency reactive magnetron sputtering method with Al and Sc targets. It
    was confirmed that WZ-(Al1−xScx)N thin films was epitaxially grown on Nb:STO substrates
    for 0<x<0.49. It was revealed that the films with x≤0.3 was found to be multi-domain
    films in terms of in-plane orientation. In fact, coexistence of two rotation domains,
    i.e., (Al,Sc)N[100]//Nb:STO[11 ̅0] and (Al,Sc)N[100]//Nb:STO[112 ̅] was evidenced.
    Further, the abundance of those two domains was varied with x and the films with
    x>0.3 were single-crystal like single domain films. Although rotation domains
    were formed. Although lattice parameters and domain structure changed with x in
    complicated manner, the evaluated unit-cell volume was in good accordance with
    Vegard's law. Those results indicated that unit-cell volume was simply governed
    by chemical composition, x.
  description_type: abstract
  lang: und

## Creator

- name: Kota Hasegawa
  role: author
- name: Takao Shimizu
  role: author
  orcid: https://orcid.org/0000-0001-9508-7601
  organization: National Institute for Materials Science
- name: Naoki Ohashi
  role: author
  orcid: https://orcid.org/0000-0002-4011-0031
  organization: National Institute for Materials Science

## Contact agent



## Publisher

organization: Ceramic Society of Japan

## Managing organization



## Keyword

- subject: "(Al,Sc)N"
  schema: not_defined
- subject: Epitaxial films
  schema: not_defined
- subject: magnetron sputtering
  schema: not_defined
- subject: strontium titanate
  schema: not_defined
- subject: lattice mismatch
  schema: not_defined
- subject: lattice orientation
  schema: not_defined
- subject: Scandium Aluminate
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Journal of the Ceramic Society of Japan
  issn: '13486535'
  volume: '131'
  issue: '7'
  start_page: 242
  end_page: 247
  article_number: '23002'

## Conference



## Related item



## Funding

- identifier: JPMXP0112101001
  funder_name: MEXT
- identifier: JPMXP1122683430
  funder_name: MEXT

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 838029b1-cbe9-4f4e-9f95-3441d7544faa
  filename: Hasegawa_JCSJ-2.pdf
  content_type: application/pdf
  size: 649305
  md5: 9c6adb65fc4778b010647d0340595fd4

## Thumbnail

fileset_id: 838029b1-cbe9-4f4e-9f95-3441d7544faa
filename: Hasegawa_JCSJ-2.pdf