@misc{kota2023a, title = {<i>In-plane</i> lattice orientation in aluminum scandium nitride epitaxial films deposited on Nb-doped SrTiO<sub>3</sub>(111) substrates via reactive magnetron sputtering}, author = {Kota Hasegawa, Takao Shimizu, Naoki Ohashi}, publisher = {Ceramic Society of Japan}, year = {2023-07-01}, keywords = {(Al,Sc)N, Epitaxial films, magnetron sputtering, strontium titanate, lattice mismatch, lattice orientation, Scandium Aluminate} }