# High-Spatial-ResolutionNear-Infrared ThermographyUsing an Uncooled Silicon-Based Camera

https://mdr.nims.go.jp/datasets/4c1996fb-01a0-4120-b835-471b93a72982

## File

- [acsphotonics.6c01167.pdf](https://mdr.nims.go.jp/filesets/fd6a0cb2-371e-474f-b646-b3f3f63bbe42/download) ([Detail](https://mdr.nims.go.jp/filesets/fd6a0cb2-371e-474f-b646-b3f3f63bbe42.md))

## Id

4c1996fb-01a0-4120-b835-471b93a72982

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-10-26T04:09:06.090202Z

## Updated at

2026-10-26T06:46:08.607134Z

## Published at

2026-10-26T09:26:43.592530Z

## Doi



## First published url

https://doi.org/10.1021/acsphotonics.6c01167

## Date published

2026-09-02

## Recorded date published

2026-9-2

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: |-
    High-Spatial-Resolution
    Near-Infrared Thermography
    Using an Uncooled Silicon-Based Camera
  title_type: original
  lang: en

## Description

- description: The demand for noncontact temperature measurements is growing as the
    microelectronic features to be probed become progressively smaller. However, traditional
    thermal imaging with infrared cameras is fundamentally constrained by the micron-long
    wavelength of thermal emission. In this study, we explore a cost-effective, high-spatial-resolution
    thermography technique utilizing an uncooled silicon CMOS camera with an optical
    microscope setup. By detecting the integrated near-infrared (NIR, 700–1100 nm)
    thermal emission from Joule-heated metallic microstructures, our method successfully
    bypasses the traditional microbolometer’s diffraction limit and spatial resolution
    constraints. To ensure accurate temperature estimation, the camera is calibrated
    by leveraging the temperature-dependent Raman peak shift of hexagonal boron nitride
    flakes. Our optical microscope setup is in an oversampling condition, allowing
    us to exploit digital binning to achieve significant noise reduction and to directly
    visualize and map thermal emission at temperatures as low as 413 K for our titanium
    sample, which has an emissivity of around 0.4 in the NIR. This method provides
    a robust, highly capable tool for diagnosing localized thermal bottlenecks and
    mapping heat diffusion in high-density microelectronics.
  description_type: abstract
  lang: und

## Creator

- name: Ilario Bisignano
  role: author
  orcid: https://orcid.org/0009-0004-9964-2106
  organization: National Institute for Materials Science
- name: Po-Sheng Shih
  role: author
- name: Masataka Imura
  role: author
  orcid: https://orcid.org/0000-0002-4236-9549
  organization: National Institute for Materials Science
- name: Kuo-Ping Chen
  role: author
- name: Satoshi Ishii
  role: author
  orcid: https://orcid.org/0000-0003-0731-8428
  organization: National Institute for Materials Science

## Contact agent



## Publisher

organization: American Chemical Society (ACS)

## Managing organization



## Keyword

- subject: IR camera
  schema: not_defined
- subject: Thermography
  schema: not_defined
- subject: CMOS camera
  schema: not_defined
- subject: Raman spectroscopy
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/
  date_licensed: 2026-08-12

## Other identifier(s)



## Data origin



## Embargo



## Journal

- title: ACS Photonics
  issn: '23304022'
  volume: '13'
  issue: '17'
  start_page: 5139
  end_page: 5146

## Conference



## Related item



## Funding

- identifier: 22H01917
  funder_name: Japan Society for the Promotion of Science
- identifier: 24K21723
  funder_name: Japan Society for the Promotion of Science
- identifier: 26K22705
  funder_name: Japan Society for the Promotion of Science
- identifier: JPMXP1225NM5171
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: JPMXP1225NM5172
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: JPMXP1226NM5146
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: JPMXP1226NM5147
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: JPMJFR2139
  funder_name: Fusion Oriented REsearch for disruptive Science and Technology
- identifier: JPJ013268
  funder_name: Innovative Science and Technology Initiative for Security, Acquisition,
    Technology and Logistics Agency

## Instrument



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## Measurement method



## Specimen



## Chemical composition



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## Process for specimen treatment



## Computational method



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## Fileset

- id: fd6a0cb2-371e-474f-b646-b3f3f63bbe42
  filename: acsphotonics.6c01167.pdf
  content_type: application/pdf
  size: 11548820
  md5: 6997c7c746ecff667ec09aaa17a66006

## Thumbnail

fileset_id: fd6a0cb2-371e-474f-b646-b3f3f63bbe42
filename: acsphotonics.6c01167.pdf