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説明:

The demand for noncontact temperature measurements is growing as the microelectronic features to be probed become progressively smaller. However, traditional thermal imaging with infrared cameras is fundamentally constrained by the micron-long wavelength of thermal emission. In this study, we explore a cost-effective, high-spatial-resolution thermography technique utilizing an uncooled silicon CMOS camera with an optical microscope setup. By detecting the integrated near-infrared (NIR, 700–1100 nm) thermal emission from Joule-heated metallic microstructures, our method successfully bypasses the traditional microbolometer’s diffraction limit and spatial resolution constraints. To ensure accurate temperature estimation, the camera is calibrated by leveraging the temperature-dependent Raman peak shift of hexagonal boron nitride flakes. Our optical microscope setup is in an oversampling condition, allowing us to exploit digital binning to achieve significant noise reduction and to directly visualize and map thermal emission at temperatures as low as 413 K for our titanium sample, which has an emissivity of around 0.4 in the NIR. This method provides a robust, highly capable tool for diagnosing localized thermal bottlenecks and mapping heat diffusion in high-density microelectronics.

権利情報:

• Creative Commons BY Attribution 4.0 International
  

キーワード: IR camera, Thermography, CMOS camera, Raman spectroscopy

刊行年月日: 2026-09-02

出版者: American Chemical Society (ACS)

掲載誌:

• ACS Photonics (ISSN: 23304022) vol. 13 issue. 17 p. 5139-5146

研究助成金:

• Japan Society for the Promotion of Science 22H01917
• Japan Society for the Promotion of Science 24K21723
• Japan Society for the Promotion of Science 26K22705
• Ministry of Education, Culture, Sports, Science and Technology JPMXP1225NM5171
• Ministry of Education, Culture, Sports, Science and Technology JPMXP1225NM5172
• Ministry of Education, Culture, Sports, Science and Technology JPMXP1226NM5146
• Ministry of Education, Culture, Sports, Science and Technology JPMXP1226NM5147
• Fusion Oriented REsearch for disruptive Science and Technology JPMJFR2139
• Innovative Science and Technology Initiative for Security, Acquisition, Technology and Logistics Agency JPJ013268

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.1021/acsphotonics.6c01167

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更新時刻: 2026-10-26 15:46:08 +0900

MDRでの公開時刻: 2026-10-26 18:26:43 +0900