# Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state quantum sensor

https://mdr.nims.go.jp/datasets/4ba877ed-95c8-4715-b390-1940aa18b611

## File

- [TSTA_26_2546779.pdf](https://mdr.nims.go.jp/filesets/ee2ae24c-2320-44bb-a19c-1c784875c0d9/download) ([Detail](https://mdr.nims.go.jp/filesets/ee2ae24c-2320-44bb-a19c-1c784875c0d9.md))

## Id

4ba877ed-95c8-4715-b390-1940aa18b611

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-10-16T03:18:42.448678Z

## Updated at

2025-10-28T03:30:35.229609Z

## Published at

2025-10-28T03:16:21.974707Z

## Doi



## First published url

https://doi.org/10.1080/14686996.2025.2546779

## Date published

2025-12-31

## Recorded date published

2025-12-31

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Measuring the stress tensor in nitrogen-doped CVD diamond using solid-state
    quantum sensor
  title_type: original
  lang: en

## Description

- description: 'We measured the residual stress tensor in a nitrogen-doped chemical
    vapor deposition (001) diamond film. The stress tensor was evaluated from the
    amount of the shift in optically detected magnetic resonance (ODMR) spectra of
    NV center in the diamond. A confocal microscopy setup was used to observe the
    spatial variation of the stress tensor in the diamond film. We found that the
    components of the stress tensor, σxy, σyz, σzx, and σxx+σyy+σzz, of the residual
    stress were approximately 0.077, -0.39, -0.67 and 1.52 GPa, respectively in the
    x=[100], y=[010], z=[001] coordinate system. Regarding the components of the shear
    stress, σxy, σyz and σzx, the nitrogen-doped CVD diamond film grown in this study
    had mainly shear stress in the z-direction, which was the growth direction of
    the CVD diamond film. In addition, regarding axial stress σxx+σyy+σzz, the CVD
    diamond film was subjected to compressive stress. Due to this compressive stress,
    the volume of the CVD diamond film decreased by approximately 0.073%. We considered
    that nitrogen doping contributed to the decrease in volume of the CVD diamond
    film. '
  description_type: abstract
  lang: und

## Creator

- name: T. Tsuji
  role: author
  orcid: https://orcid.org/0000-0002-7342-6198
  organization: National Institute for Materials Science
- name: S. Harada
  role: author
- name: T. Teraji
  role: author
  orcid: https://orcid.org/0000-0002-7731-0547
  organization: National Institute for Materials Science

## Contact agent



## Publisher

organization: Informa UK Limited

## Managing organization



## Keyword

- subject: diamond
  schema: not_defined
- subject: stress
  schema: not_defined
- subject: NV center
  schema: not_defined
- subject: chemical vapor deposition
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Science and Technology of Advanced Materials
  issn: '14686996'
  volume: '26'
  issue: '1'
  article_number: '2546779'

## Conference



## Related item



## Funding

- identifier: JPMXS0118068379
  funder_name: MEXT Q-LEAP
- identifier: JPMXS0118067395
  funder_name: MEXT Q-LEAP
- identifier: JPMJMS2062
  funder_name: JST Moonshot R&D
- identifier: JPMI00316
  funder_name: MIC R&D for construction of a global quantum cryptography network
- identifier: JPMJAP24C1
  funder_name: CSTI SIP “Promoting the application of the advanced quantum technology
    platforms to social issues”, JST ASPIRE
- identifier: 24H00406
  funder_name: JSPS KAKENHI
- identifier: 24K22963
  funder_name: JSPS KAKENHI

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



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## Computational method



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## Fileset

- id: ee2ae24c-2320-44bb-a19c-1c784875c0d9
  filename: TSTA_26_2546779.pdf
  content_type: application/pdf
  size: 4431610
  md5: a0a8c618ed75e225314c7a78ea1fb6a3

## Thumbnail

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filename: TSTA_26_2546779.pdf