口頭発表 Determination of Inelastic Mean Free Paths in Elemental Solids in the 200 to 5000 eV Energy Range by Absolute Elastic Peak Electron Spectroscopy

Tanuma,S SAMURAI ORCID (物質・材料研究機構) ; Okamoto, N (物質・材料研究機構) ; Azuma, Y ; Kimura, T (物質・材料研究機構) ; Goto, K (名古屋工業大学)

コレクション

引用
Tanuma,S, Okamoto, N, Azuma, Y, Kimura, T, Goto, K. Determination of Inelastic Mean Free Paths in Elemental Solids in the 200 to 5000 eV Energy Range by Absolute Elastic Peak Electron Spectroscopy. https://doi.org/10.48505/nims.4210

説明:

(abstract)

Recently Goto have done a precise measurement of transmission efficiency using a new method. Then, we have carried out the experimental determinations of IMFPs for 14 elemental solids in the 200-5000 eV energy range from absolute backscattered elastic-peak intensities taken by a novel CMA together with Monte Carlo (MC) calculations and also calculated IMFPs of the elemental solids with the Penn algorithm. At relatively high-energy region (over 200 eV), the values of energy/IMFP versus log (E) should be a straight line (Fano Plot). Then, we present an evaluation of the correction equations for surface-electron excitation proposed by Werner et. al., Oswald and Chen et. al. using Fano Plots.

権利情報:

キーワード: IMFP, TPP-2M, AES, XPS

会議: 11th Joint Vacuum Conference (2006-09-24 - 2006-09-28)

研究助成金:

原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.4210

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更新時刻: 2023-07-07 09:23:43 +0900

MDRでの公開時刻: 2023-07-07 13:30:20 +0900

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