Presentation Determination of Inelastic Mean Free Paths in Elemental Solids in the 200 to 5000 eV Energy Range by Absolute Elastic Peak Electron Spectroscopy

Tanuma，S SAMURAI ORCID (物質・材料研究機構) ; Okamoto, N (物質・材料研究機構) ; Azuma, Y ; Kimura, T (物質・材料研究機構) ; Goto, K (名古屋工業大学)

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Tanuma，S, Okamoto, N, Azuma, Y, Kimura, T, Goto, K. Determination of Inelastic Mean Free Paths in Elemental Solids in the 200 to 5000 eV Energy Range by Absolute Elastic Peak Electron Spectroscopy . https://doi.org/10.48505/nims.4210

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(abstract)

Recently Goto have done a precise measurement of transmission efficiency using a new method. Then, we have carried out the experimental determinations of IMFPs for 14 elemental solids in the 200-5000 eV energy range from absolute backscattered elastic-peak intensities taken by a novel CMA together with Monte Carlo (MC) calculations and also calculated IMFPs of the elemental solids with the Penn algorithm. At relatively high-energy region (over 200 eV), the values of energy/IMFP versus log (E) should be a straight line (Fano Plot). Then, we present an evaluation of the correction equations for surface-electron excitation proposed by Werner et. al., Oswald and Chen et. al. using Fano Plots.

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Keyword: IMFP, TPP-2M, AES, XPS

Conference: 11th Joint Vacuum Conference (2006-09-24 - 2006-09-28)

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Manuscript type: Not a journal article

MDR DOI: https://doi.org/10.48505/nims.4210

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Updated at: 2025-04-10 21:44:01 +0900

Published on MDR: 2023-07-07 13:30:20 +0900

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