@article{oshima,
  title = {Demonstration of β-Ga                    <sub>2</sub>                    O                    <sub>3</sub>                    MEMS resonators fabricated by crystallographic gas etching of (001) β-Ga                    <sub>2</sub>                    O                    <sub>3</sub>                    substrates},
  author = {Takayoshi Oshima, Yuichi Oshima, Yuto Amano, Masataka Imura, Meiyong Liao, Ya Zhang},
  publisher = {IOP Publishing},
  year = {2026},
  keywords = {Ga2O3, MEMS}
}