@misc{takayoshi2026a,
  title = {Wet etching of (−102) β-Ga
                      <sub>2</sub>
                      O
                      <sub>3</sub>
                      with tetramethylammonium hydroxide (TMAH)},
  author = {Takayoshi Oshima},
  publisher = {Informa UK Limited},
  year = {2026-12-31},
  keywords = {Ga2O3, wet etching, TMAH}
}