High-yield fabrication of bubble-free magic-angle twisted bilayer graphene devices with high twist-angle homogeneity

Jaime Díez-Mérida; Ipsita Das; Giorgio Di Battista; Andrés Díez-Carlón; Martin Lee; Lunjie Zeng; Kenji Watanabe; Takashi Taniguchi; Eva Olsson; Dmitri K. Efetov

doi:10.1016/j.newton.2024.100007

論文 High-yield fabrication of bubble-free magic-angle twisted bilayer graphene devices with high twist-angle homogeneity

Jaime Díez-Mérida ; Ipsita Das ; Giorgio Di Battista ; Andrés Díez-Carlón ; Martin Lee ; Lunjie Zeng ; Kenji Watanabe (National Institute for Materials Science) ; Takashi Taniguchi (National Institute for Materials Science) ; Eva Olsson ; Dmitri K. Efetov

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Jaime Díez-Mérida, Ipsita Das, Giorgio Di Battista, Andrés Díez-Carlón, Martin Lee, Lunjie Zeng, Kenji Watanabe, Takashi Taniguchi, Eva Olsson, Dmitri K. Efetov. High-yield fabrication of bubble-free magic-angle twisted bilayer graphene devices with high twist-angle homogeneity. Newton. 2025, 1 (1), 100007. https://doi.org/10.1016/j.newton.2024.100007

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(abstract)

Magic-angle twisted bilayer graphene (MATBG) stands as one of the most versatile materials in condensed-matter physics due to its hosting of a wide variety of exotic phases while also offering convenient tunability. However, the fabrication of MATBG is still manual, and remains to be a challenging and inefficient process, with devices being highly dependent on specific fabrication methods, that often result in inconsistency and variability. In this work, we present an optimized protocol for the fabrication of MATBG samples, for which we use deterministic graphene anchoring to stabilize the twist-angle, and a careful bubble removal techniques to ensure a high twist-angle homogeneity. We use low-temperature transport experiments to extract the average twist-angle between pairs of leads. We find that up to ~ 38% of the so fabricated devices show μ m2 sized regions with a twist-angle in the range θ = 1.1 ± 0.1 ⁰ , and a twist-angle variation of only Δθ ≤ 0.02⁰ , where in some instances such regions were up to 36 μ m2 large. We are certain that the discussed protocols can be directly transferred to non-graphene materials, and will be useful for the growing field of moiré materials.

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