@misc{masatomo2023a,
  title = {Fabrication of AlGaN/GaN heterostructures on halide vapor phase epitaxy AlN/SiC templates for high electron mobility transistor application},
  author = {Masatomo Sumiya, Osamu Goto, Yuki Takahara, Yasutaka Imanaka, Liwen Sang, Noboru Fukuhara, Taichiro Konno, Fumimasa Horikiri, Takeshi Kimura, Akira Uedono, Hajime Fujikura},
  publisher = {IOP Publishing},
  year = {2023-08-01},
  keywords = {HEMT, III-V nitride semiconductor, heterointerface}
}