# Ultrathin Single-Crystal Diamond NEMS Cantilevers for High-Sensitivity Nanomechanical Sensing

https://mdr.nims.go.jp/datasets/426b0a9e-fdd6-49e1-913a-73efb2b4fbc4

## File

- [SPRING2026 - Abstract 595.pdf](https://mdr.nims.go.jp/filesets/ad0ddd1d-0e7f-4635-8c52-d0742be54c6d/download) ([Detail](https://mdr.nims.go.jp/filesets/ad0ddd1d-0e7f-4635-8c52-d0742be54c6d.md))

## Id

426b0a9e-fdd6-49e1-913a-73efb2b4fbc4

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-10-10T09:32:09.198786Z

## Updated at

2026-10-13T08:00:44.570261Z

## Published at

2026-10-13T09:28:30.169462Z

## Doi

https://doi.org/10.48505/nims.8656

## First published url



## Date published



## Recorded date published



## Resource type

conference_paper

## Manuscript type

na

## Collection



## Title

- title: Ultrathin Single-Crystal Diamond NEMS Cantilevers for High-Sensitivity Nanomechanical
    Sensing
  title_type: original
  lang: en

## Description

- description: "Ultrathin nanoelectromechanical system (NEMS) resonators are essential
    for achieving ultimate force and mass sensitivity, yet fabricating mechanically
    robust devices with nanometer-scale thickness and low dissipation remains a major
    challenge. In particular, conventional semiconductor materials suffer from enhanced
    surface-related losses when scaled to the nanoscale, while two-dimensional (2D)
    materials, despite their atomic thickness, face limitations in reproducibility,
    controllability, and quality (Q) factors. These challenges motivate the search
    for an ultrathin NEMS platform that combines nanoscale dimensions with high mechanical
    stability and scalability.\r\nThese results establish ultrathin single-crystal
    diamond as a highly promising NEMS material platform that bridges the gap between
    conventional MEMS materials and 2D nanomechanical systems. The demonstrated fabrication
    strategy and device performance open a viable pathway toward scalable, high-sensitivity,
    and thermally stable nanomechanical sensors for applications in force spectroscopy,
    mass detection, and operation in harsh environments."
  description_type: abstract
  lang: eng

## Creator

- name: G. Chen
  role: author
  orcid: https://orcid.org/0009-0004-9263-5616
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: W. Zhao
  role: author
  orcid: https://orcid.org/0000-0001-8159-8195
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Z. Zhang
  role: author
  orcid: https://orcid.org/0009-0003-8745-4469
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: S. Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: M. Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

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## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: The European Materials Research Society (E-MRS) 2026 Spring Meeting & Exhibit
start_date: 2026-05-25
end_date: 2026-05-29
identifier: https://www.european-mrs.com/meetings/2026-spring-meeting-exhibit

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## Fileset

- id: ad0ddd1d-0e7f-4635-8c52-d0742be54c6d
  filename: SPRING2026 - Abstract 595.pdf
  content_type: application/pdf
  size: 273959
  md5: e7171d40c20af57725c757a24bdf40da

## Thumbnail

fileset_id: ad0ddd1d-0e7f-4635-8c52-d0742be54c6d
filename: SPRING2026 - Abstract 595.pdf