# Composition determination of beta-(AlxGa1-x)2O3 layers coherently grown on (010) beta-Ga2O3 substrates by high-resolution x-ray diffraction

https://mdr.nims.go.jp/datasets/42387f9b-f2d2-496f-ab6c-9ad9b860d55c

## Files

- [Al-composition-xrd(APEX)2nd.pdf](https://mdr.nims.go.jp/filesets/b1077a29-9f78-4566-91d1-9c4dfb5de763/download) ([Detail](https://mdr.nims.go.jp/filesets/b1077a29-9f78-4566-91d1-9c4dfb5de763.md))

## Id

42387f9b-f2d2-496f-ab6c-9ad9b860d55c

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-01-07T05:28:09.268035Z

## Updated at

2024-01-24T00:26:50.422622Z

## Published at

2024-01-11T23:30:11.475329Z

## Doi

https://doi.org/10.48505/nims.4327

## First published url

https://doi.org/10.7567/APEX.9.061102

## Date published

2016-06-01

## Recorded date published

2016-6-1

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: "(010) beta-Ga2O3基板上にコヒレント成長したbeta-(AlxGa1-x)2O3薄膜の高分解能XRDによる組成決定"
  title_type: alternative
  lang: ja
- title: Composition determination of beta-(AlxGa1-x)2O3 layers coherently grown on
    (010) beta-Ga2O3 substrates by high-resolution x-ray diffraction
  title_type: original
  lang: en

## Description

- description: We demonstrate x-ray diffraction based composition estimation of b-(AlxGa1-x)2O3
    coherently grown on (010) b-Ga2O3. The relation between the strain along the [010]
    direction and the Al composition of the b-(AlxGa1-x)2O3 layer was formulated by
    using stress-strain relationship in the monoclinic system. This formulation allows
    us to estimate the Al composition using out-of-plane lattice spacing determined
    by conventional x-ray omega-2theta measurements. This method was applied to MBE-grown
    coherent b-(AlxGa1-x)2O3/Ga2O3 heterostructures, and the Al composition in the
    b-(AlxGa1-x)2O3 are in close agreement with composition determined directly by
    atom probe tomography.
  description_type: abstract
  lang: eng

## Creator

- name: Yuichi Oshima
  role: author
  orcid: https://orcid.org/0000-0001-8293-4891
  organization: National Institute for Materials Science
- name: Elaheh Ahmadi
  role: author
- name: Stefan C. Badescu
  role: author
- name: Feng Wu
  role: author
- name: James S. Speck
  role: author

## Contact agent



## Publisher

organization: IOP Publishing

## Managing organization



## Keyword

- subject: β-Ga2O3
  schema: not_defined
- subject: composition
  schema: not_defined
- subject: atom probe
  schema: not_defined

## Rights

- description: "@2016 The Japan Society of Applied Physics<br>\r\nThis is an author-created,
    un-copyedited version of an article accepted for publication/published in Applied
    Physics Express. IOP Publishing Ltd is not responsible for any errors or omissions
    in this version of the manuscript or any version derived from it. The Version
    of Record is available online at https://doi.org/10.7567/APEX.9.061102."
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin



## Embargo



## Journal

- title: APPLIED PHYSICS EXPRESS
  issn: '18820778'
  volume: '9'
  issue: '6'
  start_page: 61102
  end_page: 61102

## Conference



## Related item



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## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



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## Fileset

- id: b1077a29-9f78-4566-91d1-9c4dfb5de763
  filename: Al-composition-xrd(APEX)2nd.pdf
  content_type: application/pdf
  size: 688439
  md5: 0d8b32d56d7a2571e588b3ea2a7c90b0

## Thumbnail

fileset_id: b1077a29-9f78-4566-91d1-9c4dfb5de763
filename: Al-composition-xrd(APEX)2nd.pdf