@misc{yuichi2016a,
  title = {Composition determination of beta-(AlxGa1-x)2O3 layers coherently grown on (010) beta-Ga2O3 substrates by high-resolution x-ray diffraction},
  author = {Yuichi Oshima, Elaheh Ahmadi, Stefan C. Badescu, Feng Wu, James S. Speck},
  publisher = {IOP Publishing},
  year = {2016-06-01},
  keywords = {β-Ga2O3, composition, atom probe}
}