# 表面電子分光法における電子の散乱効果の研究

https://mdr.nims.go.jp/datasets/42075a75-380f-445c-a52a-887413320242

## File

- [表面電子分光_研究紹介3＿2.pdf](https://mdr.nims.go.jp/filesets/3c747842-b1a0-41b4-ad94-7a33dad26183/download) ([Detail](https://mdr.nims.go.jp/filesets/3c747842-b1a0-41b4-ad94-7a33dad26183.md))
- [図.pdf](https://mdr.nims.go.jp/filesets/7be58527-938b-4b02-a8b3-b4a8fd81b93b/download) ([Detail](https://mdr.nims.go.jp/filesets/7be58527-938b-4b02-a8b3-b4a8fd81b93b.md))

## Id

42075a75-380f-445c-a52a-887413320242

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-06-28T02:09:57.291125Z

## Updated at

2024-01-05T13:11:57.490626Z

## Published at

2023-07-04T04:30:20.234786Z

## Doi

https://doi.org/10.48505/nims.4211

## First published url

https://doi.org/10.1380/jsssj.27.657

## Date published

2007-04-04

## Recorded date published

2006

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: 表面電子分光法における電子の散乱効果の研究
  title_type: original
  lang: ja

## Description

- description: This article describes the inelastic scattering effect on surface electron
    spectroscopies such as XPS and AES. It is very important to describe the attenuation
    rate of the electron signal due to inelastic scattering events in a solid in order
    to improve the accuracy of quantitative surface analysis. For this, “attenuation
    length (AL) “ has been used for a long time to describe the attenuation rate.
    AL is, however, replaced by the “effective attenuation length (EAL), which includes
    the elastic scattering effect, because the signal electrons may not vary exponentially
    with the thickness of an overlayer film due to the elastic scattering. Then, the
    meanings and measurements of physical quantities such as electron inelastic mean
    free path (IMFP) and EAL are described.
  description_type: abstract
  lang: en

## Creator

- name: 田沼繁夫
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: 物質・材料研究機構

## Contact agent



## Publisher

organization: 日本表面科学会

## Managing organization



## Keyword

- subject: attenuation length
  schema: not_defined
- subject: effective attenuation length
  schema: not_defined
- subject: IMFP
  schema: not_defined
- subject: inelastic scattering effect
  schema: not_defined
- subject: surface electron spectroscopies
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: 表面科学
  issn: '03885321'
  volume: '27'
  issue: '11'
  start_page: 657
  end_page: 661

## Conference



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## Measurement method



## Specimen



## Chemical composition



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## Fileset

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  filename: 表面電子分光_研究紹介3＿2.pdf
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- id: 7be58527-938b-4b02-a8b3-b4a8fd81b93b
  filename: 図.pdf
  content_type: application/pdf
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## Thumbnail

fileset_id: 7be58527-938b-4b02-a8b3-b4a8fd81b93b
filename: 図.pdf