# Scalable alloy-based sputtering of high-conductivity PdCoO2 for advanced interconnects

https://mdr.nims.go.jp/datasets/41f58beb-cf13-44e6-ba7b-4fbd69907f6f

## File

- [PdCoO2_sputtering_T_Harada_etal.pdf](https://mdr.nims.go.jp/filesets/50bce2e0-04d7-47c2-93e5-2312b5c5bc6c/download) ([Detail](https://mdr.nims.go.jp/filesets/50bce2e0-04d7-47c2-93e5-2312b5c5bc6c.md))

## Id

41f58beb-cf13-44e6-ba7b-4fbd69907f6f

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-06-09T05:48:34.542531Z

## Updated at

2025-06-09T23:30:11.204620Z

## Published at

2025-06-09T23:19:16.998066Z

## Doi

https://doi.org/10.48505/nims.5528

## First published url

https://doi.org/10.1063/5.0260219

## Date published

2025-06-02

## Recorded date published

2025-6-2

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Scalable alloy-based sputtering of high-conductivity PdCoO2 for advanced
    interconnects
  title_type: original
  lang: en

## Description

- description: "As integrated circuits continue to scale down, the search for alternative
    metals is becoming increasingly important due to the rising resistivity\r\nof
    traditional copper-based interconnects. A layered oxide PdCoO2 is one of the candidate
    materials for interconnects, having bulk ab-plane\r\nconductivity exceeding that
    of elemental Al. Despite its potential, wafer-scale vacuum deposition of PdCoO2,
    crucial for interconnect applications,\r\nhas not yet been reported. In this study,
    we demonstrate the scalable growth of c-axis oriented PdCoO2 thin films via reactive
    sputtering\r\nfrom Pd-Co alloy targets. Our method paves the way to harness the
    unique properties of PdCoO2 in semiconductor devices."
  description_type: abstract
  lang: und

## Creator

- name: Takayuki Harada
  role: author
  orcid: https://orcid.org/0000-0002-8657-2258
- name: Zuin Ping Lily Ang
  role: author
  orcid: https://orcid.org/0009-0008-1139-7273
- name: Yuki Sakakibara
  role: author
  orcid: https://orcid.org/0009-0005-8271-2531
- name: Takuro Nagai
  role: author
  orcid: https://orcid.org/0000-0001-5239-3334
- name: Yasushi Masahiro
  role: author
  orcid: https://orcid.org/0000-0003-4526-6817

## Contact agent



## Publisher

organization: AIP Publishing

## Managing organization



## Keyword

- subject: Interconnect
  schema: not_defined
- subject: Thin films
  schema: not_defined
- subject: Conductive material
  schema: not_defined
- subject: Low dimensional materials
  schema: not_defined
- subject: Electronic materials
  schema: not_defined

## Rights

- description: 'This article may be downloaded for personal use only. Any other use
    requires prior permission of the author and AIP Publishing. This article appeared
    in Takayuki Harada, Zuin Ping Lily Ang, Yuki Sakakibara, Takuro Nagai, Yasushi
    Masahiro; Scalable alloy-based sputtering of high-conductivity PdCoO2 for advanced
    interconnects. Appl. Phys. Lett. 2 June 2025; 126 (22): 221902 and may be found
    at https://doi.org/10.1063/5.0260219.'
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Applied Physics Letters
  issn: '00036951'
  volume: '126'
  issue: '22'

## Conference



## Related item



## Funding

- identifier: JPMJPR20AD
  funder_name: Precursory Research for Embryonic Science and Technology
- identifier: 24K01353
  funder_name: Japan Society for the Promotion of Science London

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 50bce2e0-04d7-47c2-93e5-2312b5c5bc6c
  filename: PdCoO2_sputtering_T_Harada_etal.pdf
  content_type: application/pdf
  size: 1102394
  md5: 98f46e3475f71a512ad1f0117bf34779

## Thumbnail

fileset_id: 50bce2e0-04d7-47c2-93e5-2312b5c5bc6c
filename: PdCoO2_sputtering_T_Harada_etal.pdf