@misc{takayuki2025a, title = {Scalable alloy-based sputtering of high-conductivity PdCoO2 for advanced interconnects}, author = {Takayuki Harada, Zuin Ping Lily Ang, Yuki Sakakibara, Takuro Nagai, Yasushi Masahiro}, publisher = {AIP Publishing}, year = {2025-06-02}, keywords = {Interconnect, Thin films, Conductive material, Low dimensional materials, Electronic materials} }