# Quantitative theoretical analysis of the electrostatic force between a metallic tip and semiconductor surface in Kelvin probe force microscopy

https://mdr.nims.go.jp/datasets/4161da21-8b1e-438a-a15a-d13ae45307ca

## File

- [s-info3.pdf](https://mdr.nims.go.jp/filesets/4be508c5-2fb4-421d-a52c-a714c70bcbf8/download) ([Detail](https://mdr.nims.go.jp/filesets/4be508c5-2fb4-421d-a52c-a714c70bcbf8.md))
- [draft06.pdf](https://mdr.nims.go.jp/filesets/2e0eff3d-7217-48f9-af6a-9e5e9970c8ac/download) ([Detail](https://mdr.nims.go.jp/filesets/2e0eff3d-7217-48f9-af6a-9e5e9970c8ac.md))

## Id

4161da21-8b1e-438a-a15a-d13ae45307ca

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-12-16T06:03:58.528786Z

## Updated at

2025-12-02T23:30:21.010164Z

## Published at

2025-12-02T23:22:53.806674Z

## Doi

https://doi.org/10.48505/nims.5169

## First published url

https://doi.org/10.1088/1361-6528/ad960e

## Date published

2025-02-17

## Recorded date published

2025-2-17

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Quantitative theoretical analysis of the electrostatic force between a metallic
    tip and semiconductor surface in Kelvin probe force microscopy
  title_type: original
  lang: en

## Description

- description: Theoretical analysis of the electrostatic force between a metallic
    tip and semiconductor surface in Kelvin probe force microscopy (KPFM) measurements
    has been challenging due to the complexity introduced by tip-induced band bending
    (TIBB). In this study, we present a method for numerically computing the electrostatic
    forces in a fully three-dimensional (3D) configuration. Our calculations on a
    system composed of a metallic tip and GaAs(110) surface revealed deviations from
    parabolic behavior in the bias dependence of the electrostatic force, which is
    consistent with previously reported experimental results. In addition, we show
    that the tip radii estimated from curve fitting of the theory to experimental
    data provide reasonable values, consistent with the shapes of tip apex observed
    using scanning electron microscopy. The 3D simulation, which accounted for the
    influence of TIBB, enables a detailed analysis of the physics involved in KPFM
    measurements of semiconductor samples, thereby contributing to the development
    of more accurate measurement and analytical methods.
  description_type: abstract
  lang: und

## Creator

- name: Nobuyuki Ishida
  role: author
  orcid: https://orcid.org/0000-0003-0161-0583
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Takaaki Mano
  role: author
  orcid: https://orcid.org/0000-0002-6955-260X
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: IOP Publishing

## Managing organization



## Keyword

- subject: Kelvin probe force microscopy
  schema: not_defined
- subject: Simulation
  schema: not_defined
- subject: GaAs(110)
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2024-12-03
end_date: 2025-12-03

## Journal

- title: Nanotechnology
  issn: '13616528'
  volume: '36'
  issue: '7'
  article_number: '075701'

## Conference



## Related item



## Funding

- identifier: 24K01367
  funder_name: JSPS KAKENHI
- identifier: JP17K06366
  funder_name: JSPS KAKENHI
- identifier: JP21H01818
  funder_name: JSPS KAKENHI

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



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## Process for specimen treatment



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## Fileset

- id: 4be508c5-2fb4-421d-a52c-a714c70bcbf8
  filename: s-info3.pdf
  content_type: application/pdf
  size: 844134
  md5: ada799688439faa890e0c80be3f5fe1f
- id: 2e0eff3d-7217-48f9-af6a-9e5e9970c8ac
  filename: draft06.pdf
  content_type: application/pdf
  size: 491685
  md5: d0a408ce39c101a7532255c0df13f19c

## Thumbnail

fileset_id: 4be508c5-2fb4-421d-a52c-a714c70bcbf8
filename: s-info3.pdf