# Ultrathin specimen preparation by a low energy Ar ion milling method

https://mdr.nims.go.jp/datasets/3877683b-3a8c-4009-8173-e7b1783a54ba

## File

- [manuscript Mitome r1.pdf](https://mdr.nims.go.jp/filesets/fce93baa-05b1-473e-bc2b-18b597634fc2/download) ([Detail](https://mdr.nims.go.jp/filesets/fce93baa-05b1-473e-bc2b-18b597634fc2.md))

## Id

3877683b-3a8c-4009-8173-e7b1783a54ba

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-04-27T05:43:54.351524Z

## Updated at

2024-03-04T23:30:19.392295Z

## Published at

2024-03-04T23:30:19.461274Z

## Doi

https://doi.org/10.48505/nims.4420

## First published url

https://doi.org/10.1093/jmicro/dfs073

## Date published

2012-11-14

## Recorded date published

2013-4

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: 超低エネルギーイオンミリング法による超薄試料の作製
  title_type: alternative
  lang: ja
- title: Ultrathin specimen preparation by a low energy Ar ion milling method
  title_type: original
  lang: en

## Description

- description: 'An ultra low energy ion milling method was used to prepare ultrathin
    specimen for transmission electron microscope observation. The samples were thinned
    initially by a usual focused ion beam technique or a usual ion milling with higher
    energy of 2-10 keV, and were thinned additionally by Ar+ ion beam with energy
    lower than 1 keV, typically 500-900 eV. The ultra low energy ion beam was scanned
    on the specimen and secondary electrons induced by the ion beam can be detected
    to form secondary electron images with resolution of a few μm. Because a desired
    area can be selected and thinned by the ultra low energy ion beam, redeposition
    or cross contamination with irradiating a metal mesh that supports the sample
    can be prevented. Final thickness of the specimen was typically 10 nm with a damage '
  description_type: abstract
  lang: eng

## Creator

- name: Masanori Mitome
  role: author
  orcid: https://orcid.org/0000-0003-1192-9838

## Contact agent



## Publisher

organization: Oxford University Press (OUP)

## Managing organization



## Keyword

- subject: Ar-ion milling
  schema: not_defined
- subject: sample preparation
  schema: not_defined
- subject: ultrathin specimen
  schema: not_defined
- subject: low-energy ion beam
  schema: not_defined
- subject: gamma-Ga2O3
  schema: not_defined
- subject: "(Zn, Cr) Te"
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2012-11-14
end_date: 2013-11-14

## Journal

- title: MICROSCOPY (JOURNAL OF ELECTRON MICROSCOPY)
  issn: '20505698'
  volume: '62'
  issue: '2'
  start_page: 321
  end_page: 326

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: fce93baa-05b1-473e-bc2b-18b597634fc2
  filename: manuscript Mitome r1.pdf
  content_type: application/pdf
  size: 171201
  md5: 85e98536a8f13b67b110b511a1e2a652

## Thumbnail

fileset_id: fce93baa-05b1-473e-bc2b-18b597634fc2
filename: manuscript Mitome r1.pdf