# Ultra-High-Resolution Thermometer Based on Diamond MEMS

https://mdr.nims.go.jp/datasets/33fb0b5b-88ff-4bcf-a058-88dc37d3f165

## File

- [NDNC2025_abstract_template -WEN_Finalized　Zhao_Liao.docx](https://mdr.nims.go.jp/filesets/be1a8d8a-cbe3-44b8-b45c-544c7884e0cf/download) ([Detail](https://mdr.nims.go.jp/filesets/be1a8d8a-cbe3-44b8-b45c-544c7884e0cf.md))

## Id

33fb0b5b-88ff-4bcf-a058-88dc37d3f165

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-05-19T02:10:48.932909Z

## Updated at

2025-05-21T23:30:40.016257Z

## Published at

2025-05-21T23:23:05.373446Z

## Doi

https://doi.org/10.48505/nims.5494

## First published url



## Date published



## Recorded date published



## Resource type

conference_presentation

## Manuscript type

na

## Collection



## Title

- title: Ultra-High-Resolution Thermometer Based on Diamond MEMS
  title_type: original
  lang: en

## Description

- description: 'In this work, we propose a high-quality (Q) factor micro thermometer
    based on SCD cantilevers (Fig. 1(a)), which was fabricated by smart-cut method
    [1]. We use higher-order-modes (HOMs) to have both high resolution and sensitivity
    for precise detection of subtle temperature variations ranging from 380 K to 6.5K.
    By operation at HOMs (Fig. 1(b)), the experimental resolution of 10 mK (facility
    limit) was identified and an estimated resolution of 100 µK and a noise equivalent
    temperature of 22 nK/Hz1/2 were achieved. The temperature resolution and noise
    level establish new global benchmarks in temperature sensors among MEMS sensors.
    This work underscores the versatility and transformative potential of the diamond
    MEMS resonator as an advanced platform for ultra-high-resolution temperature sensing. '
  description_type: abstract
  lang: eng

## Creator

- name: Wen Zhao
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Tokuyuki Teraji
  role: author
  orcid: https://orcid.org/0000-0002-7731-0547
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Optical Materials
    Field/Semiconductor Defect Design Group
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

## Contact agent



## Publisher



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## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: The 18th International Conference on New Diamond and Nano Carbons
start_date: 2025-05-11
end_date: 2025-05-15
identifier: https://ndnc2025.org/index.html

## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



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## Custom property



## Fileset

- id: be1a8d8a-cbe3-44b8-b45c-544c7884e0cf
  filename: NDNC2025_abstract_template -WEN_Finalized　Zhao_Liao.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 1032355
  md5: 7ecd5db97a656fe66fb0e6ebb529a77f

## Thumbnail

fileset_id: be1a8d8a-cbe3-44b8-b45c-544c7884e0cf
filename: NDNC2025_abstract_template -WEN_Finalized　Zhao_Liao.docx