@misc{takayoshi2024a,
  title = {Formation of GaN mesas with reverse-tapered edge structures on a lattice-matched AlInN layer for a positive beveled edge termination},
  author = {Takayoshi Oshima, Masataka Imura, Yuichi Oshima},
  publisher = {Japan Society of Applied Physics},
  year = {2024-08-01},
  keywords = {GaN, AlInN, etching, positive bevel edge termination}
}