# Single-Crystal Diamond MEMS for Extreme Sensors

https://mdr.nims.go.jp/datasets/308d52ca-6dc3-4099-a39c-43edbb949786

## File

- [edtm2025-paper-template-word_Liao 10.26.pdf](https://mdr.nims.go.jp/filesets/0556aa82-5cd3-4ca6-8f5e-a73941a897c5/download) ([Detail](https://mdr.nims.go.jp/filesets/0556aa82-5cd3-4ca6-8f5e-a73941a897c5.md))

## Id

308d52ca-6dc3-4099-a39c-43edbb949786

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-07-28T04:48:20.220999Z

## Updated at

2025-07-29T07:30:25.626692Z

## Published at

2025-07-29T07:17:48.375051Z

## Doi

https://doi.org/10.48505/nims.5613

## First published url

https://doi.org/10.1109/edtm61175.2025.11041141

## Date published

2025-03-09

## Recorded date published

2025-3-9

## Resource type

conference_paper

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Single-Crystal Diamond MEMS for Extreme Sensors
  title_type: original
  lang: en

## Description

- description: Diamond has been a potential rival of Si for MEMS in terms of the outstanding
    mechanical, electrical, thermal and chemical properties. These extreme properties
    not only enable developing highly reliable MEMS devices but innovating the sensitivity,
    precision, and stability. Here, we show the advanced research on single-crystal
    diamond (SCD) MEMS achieved in our lab. These include the invention of the smart-cut
    technology for fabricating SCD MEMS structures, energy dissipation mechanisms,
    and sensing/switch applications.
  description_type: abstract
  lang: und

## Creator

- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

## Contact agent



## Publisher

organization: IEEE

## Managing organization



## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined
- subject: sensors
  schema: not_defined

## Rights

- description: "© 2025 IEEE.  Personal use of this material is permitted.  Permission
    from IEEE must be obtained for all other uses, in any current or future media,
    including reprinting/republishing this material for advertising or promotional
    purposes, creating new collective works, for resale or redistribution to servers
    or lists, or reuse of any copyrighted component of this work in other works."
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: 2025 9th IEEE Electron Devices Technology & Manufacturing Conference
    (EDTM)
  start_page: 1
  end_page: 3

## Conference



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## Instrument



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## Specimen



## Chemical composition



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## Structural feature for specimen



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## Fileset

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  filename: edtm2025-paper-template-word_Liao 10.26.pdf
  content_type: application/pdf
  size: 684103
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## Thumbnail

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filename: edtm2025-paper-template-word_Liao 10.26.pdf