# Reducing vertex radius of curvature for 100 nm size square and triangular holes in GaN by shape modification

https://mdr.nims.go.jp/datasets/2d145c06-e49c-4dab-9450-63544c254c51

## File

- [EBL_JJAP-250507.docx](https://mdr.nims.go.jp/filesets/422b36e6-8284-40c1-8c33-2ced5c0e13e4/download) ([Detail](https://mdr.nims.go.jp/filesets/422b36e6-8284-40c1-8c33-2ced5c0e13e4.md))

## Id

2d145c06-e49c-4dab-9450-63544c254c51

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-08-18T06:44:00.939001Z

## Updated at

2025-12-26T01:20:58.955311Z

## Published at

2026-06-15T23:28:41.404345Z

## Doi

https://doi.org/10.48505/nims.6081

## First published url

https://doi.org/10.35848/1347-4065/adde9a

## Date published

2025-06-01

## Recorded date published

2025-6-1

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Reducing vertex radius of curvature for 100 nm size square and triangular
    holes in GaN by shape modification
  title_type: original
  lang: en

## Description

- description: We fabricated arrays of circular, square, and triangular air holes
    in GaN by the conventional method using the electron beam lithography and reactive
    ion etching. The vertex radius of curvature for the square and triangular holes
    was reduced by shape modification. The minimum vertex radius of curvature for
    the 100-nm-size square and triangular holes were 17 and 11 nm, respectively.
  description_type: abstract
  lang: und

## Creator

- name: Kohei Tuzuku
  role: author
- name: Masataka Imura
  role: author
  orcid: https://orcid.org/0000-0002-4236-9549
- name: Hironori Okumura
  role: author
  orcid: https://orcid.org/0000-0002-5464-9169

## Contact agent



## Publisher

organization: IOP Publishing

## Managing organization



## Keyword

- subject: GaN
  schema: not_defined
- subject: EB lithography
  schema: not_defined

## Rights

- description: This is the Accepted Manuscript version of an article accepted for
    publication in Japanese Journal of Applied Physics.  IOP Publishing Ltd is not
    responsible for any errors or omissions in this version of the manuscript or any
    version derived from it.  The Version of Record is available online at https://doi.org/10.35848/1347-4065/adde9a.
  identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2025-06-16
end_date: 2026-06-16

## Journal

- title: Japanese Journal of Applied Physics
  issn: '00214922'
  volume: '64'
  issue: '6'
  article_number: '066504'

## Conference



## Related item



## Funding

- identifier: 23H01863
  funder_name: JSPS KAKENHI
- identifier: JPMXP1223BA0011
  funder_name: Advanced Research Infrastructure for Materials and Nanotechnology in
    Japan (ARIM)

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## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



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## Fileset

- id: 422b36e6-8284-40c1-8c33-2ced5c0e13e4
  filename: EBL_JJAP-250507.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 10504258
  md5: 17292f8b21e8b532451c065d11b147f5

## Thumbnail

fileset_id: 422b36e6-8284-40c1-8c33-2ced5c0e13e4
filename: EBL_JJAP-250507.docx