@misc{kohei2025a,
  title = {Reducing vertex radius of curvature for 100 nm size square and triangular holes in GaN by shape modification},
  author = {Kohei Tuzuku, Masataka Imura, Hironori Okumura},
  publisher = {IOP Publishing},
  year = {2025-06-01},
  keywords = {GaN, EB lithography}
}