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説明:

This paper reports the fabrication of thin film batteries which are composed of three stacking layers; LiCoO2, Li3PO4, and Li. First, a LiCoO2 layer is constructed on an electron-conductive substrate by pulsed laser deposition as a cathode. Crystallinity of LiCoO2 layer is mainly controlled by cationic ratio of Li and Co. Subsequently, an amorphous Li3PO4 layer with a high ionic conductivity is further deposited on the cathode LiCoO2 layer by radio frequency magnetron sputtering as a solid electrolyte. To avoid any possible damage which causes the formation of resistive species between LiCoO2 and Li3PO4, bias control of the substrate during Li3PO4 deposition is essential. Finally, a Li metal layer is deposited as an anode/current collector on the Li3PO4/LiCoO2 bilayer by resistive heating evaporation in vacuum at elevated temperature for the formation of low resistive interface. The fabricated three-layer thin film battery shows a high-rate capability when LiCoO2 layer is (104) oriented epitaxial film.

権利情報:

• Creative Commons BY Attribution 4.0 International
  

キーワード: Li-ion battery, all solid-state battery, thin fiilm battery, LiCoO2, Li3PO4

刊行年月日: 2024-04-15

出版者: Springer Science and Business Media LLC

掲載誌:

• Journal of Solid State Electrochemistry (ISSN: 14328488)

研究助成金:

• Ministry of Education, Culture, Sports, Science and Technology, Japan Materealize
• Japan Society for the Promotion of Science JP19H05813
• Japan Science and Technology Agency JPMJPF2016

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.1007/s10008-024-05873-y

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更新時刻: 2024-04-17 16:30:21 +0900

MDRでの公開時刻: 2024-04-17 16:30:21 +0900