# High-order resonance enhancing the mass sensitivity of diamond cantilevers

https://mdr.nims.go.jp/datasets/2b05237c-da9f-42f5-8d9e-ab3840628abb

## File

- [041124_1_5.0250902-min.pdf](https://mdr.nims.go.jp/filesets/3a04033d-0b29-4cff-a3aa-33d290dea357/download) ([Detail](https://mdr.nims.go.jp/filesets/3a04033d-0b29-4cff-a3aa-33d290dea357.md))

## Id

2b05237c-da9f-42f5-8d9e-ab3840628abb

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-07-11T07:01:43.534671Z

## Updated at

2025-07-11T23:30:35.036076Z

## Published at

2025-07-11T23:17:26.409558Z

## Doi



## First published url

https://doi.org/10.1063/5.0250902

## Date published

2025-04-01

## Recorded date published

2025-4-1

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: High-order resonance enhancing the mass sensitivity of diamond cantilevers
  title_type: original
  lang: en

## Description

- description: Diamond has been demonstrated as an exceptional semiconductor for microelectromechanical
    system (MEMS) sensors, offering high sensitivity and reliability due to its ultra-wide
    bandgap energy, superior mechanical properties, and high thermal conductivity.
    For MEMS resonator-type sensors that rely on frequency shift detection, such as
    mass sensors, the overall performance, including the sensitivity, speed, resolution,
    and noise level, is collectively determined by the stability of the resonance
    frequency. To improve the sensing performance, geometry optimization and nonlinear
    operation methods have been used, but these methods lead to increased fabrication
    complexity or increased energy dissipation. In this work, we propose the utilization
    of high-order resonance modes to enhance the resonance frequency stability of
    single-crystal diamond (SCD) MEMS resonators, achieving a significant improvement
    in mass resolution to as low as 0.15 atto-grams at room temperature. This approach
    offers a streamlined and competitive strategy for advancing the sensing capabilities
    of MEMS sensors.
  description_type: abstract
  lang: und

## Creator

- name: Wen Zhao
  role: author
  orcid: https://orcid.org/0000-0001-8159-8195
- name: Guo Chen
  role: author
  orcid: https://orcid.org/0009-0004-9263-5616
- name: Keyun Gu
  role: author
  orcid: https://orcid.org/0000-0002-7505-7744
- name: Masaya Toda
  role: author
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

## Contact agent



## Publisher

organization: AIP Publishing

## Managing organization



## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc/4.0/

## Other identifier(s)



## Data origin



## Embargo



## Journal

- title: APL Materials
  issn: 2166532X
  volume: '13'
  issue: '4'

## Conference



## Related item



## Funding

- identifier: 24H00287
  funder_name: Japan Society for the Promotion of Science
- identifier: 22K18957
  funder_name: Japan Society for the Promotion of Science
- identifier: 24KF0085
  funder_name: Japan Society for the Promotion of Science

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 3a04033d-0b29-4cff-a3aa-33d290dea357
  filename: 041124_1_5.0250902-min.pdf
  content_type: application/pdf
  size: 1225033
  md5: 5ba357a03a612d7bdfee708360f72cb9

## Thumbnail

fileset_id: 3a04033d-0b29-4cff-a3aa-33d290dea357
filename: 041124_1_5.0250902-min.pdf