# Frequency stability improvement of single-crystal diamond cantilever utilizing higher-order-mode excitation

https://mdr.nims.go.jp/datasets/2ab24da4-e64a-4caa-b295-74725e8e9a6c

## File

- [5 Uploaded Manuscript__WEN-DRM.docx](https://mdr.nims.go.jp/filesets/bc603588-74fc-4c6a-b98d-0053b6d5fe01/download) ([Detail](https://mdr.nims.go.jp/filesets/bc603588-74fc-4c6a-b98d-0053b6d5fe01.md))

## Id

2ab24da4-e64a-4caa-b295-74725e8e9a6c

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-07-11T02:24:53.815488Z

## Updated at

2025-07-11T07:30:21.488123Z

## Published at

2025-07-11T07:17:21.742635Z

## Doi

https://doi.org/10.48505/nims.5582

## First published url

https://doi.org/10.1016/j.diamond.2025.112592

## Date published

2025-06-26

## Recorded date published

2025-8

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Frequency stability improvement of single-crystal diamond cantilever utilizing
    higher-order-mode excitation
  title_type: original
  lang: en

## Description

- description: Enhancing the resonance stability of microelectromechanical systems
    (MEMS) resonator is critically important for achieving high-resolution performance
    in advanced sensing applications. Higher-order mode resonance yields a greater
    product of resonance frequency and quality factor, thereby enabling high-speed
    sensing. In this work, we show that higher-order-modes actuation enhances the
    frequency stability of single-crystal diamond MEMS cantilever resonator. This
    approach offers a promising strategy to develop highly precise MEMS sensors.
  description_type: abstract
  lang: und

## Creator

- name: Wen Zhao
  role: author
- name: Guo Chen
  role: author
- name: Zhaozong Zhang
  role: author
  orcid: https://orcid.org/0009-0003-8745-4469
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Diamond and Related Materials
  issn: '09259635'
  volume: '157'
  article_number: '112592'

## Conference



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## Instrument



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## Measurement method



## Specimen



## Chemical composition



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## Fileset

- id: bc603588-74fc-4c6a-b98d-0053b6d5fe01
  filename: 5 Uploaded Manuscript__WEN-DRM.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 1107146
  md5: d2b34da8f296932cbb7ef5efa0680dc6

## Thumbnail

fileset_id: bc603588-74fc-4c6a-b98d-0053b6d5fe01
filename: 5 Uploaded Manuscript__WEN-DRM.docx