# Experimental formation and mechanism study for super-high dielectric constant AlOx/TiOy nanolaminates

https://mdr.nims.go.jp/datasets/27595199-2f67-4a69-9526-e515f4790507

## File

- [nanomaterials-13-01256.pdf](https://mdr.nims.go.jp/filesets/c4de58f7-ce2d-429d-836d-5da0a12d94b4/download) ([Detail](https://mdr.nims.go.jp/filesets/c4de58f7-ce2d-429d-836d-5da0a12d94b4.md))

## Id

27595199-2f67-4a69-9526-e515f4790507

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-10-04T02:54:59.429748Z

## Updated at

2024-01-05T13:11:41.571367Z

## Published at

2023-10-05T04:30:10.049144Z

## Doi



## First published url

https://doi.org/10.3390/nano13071256

## Date published

2023-04-02

## Recorded date published



## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Experimental formation and mechanism study for super-high dielectric constant
    AlOx/TiOy nanolaminates
  title_type: original
  lang: en

## Description

- description: 'Super-high dielectric constant (k) AlOx/TiOy nanolaminates (ATO NLs)
    are deposited by an atomic layer deposition technique for application of next-generation
    electronics. Individual multilayers with uniform thicknesses are formed for the
    ATO NLs. With the increase of AlOx content in each ATO sublayer, the shape of
    Raman spectrum has a tendency to close to that of the single AlOx layer. Effects
    of ATO NL deposition conditions on electrical properties of the met-al/ATO NL/metal
    capacitors are investigated. Lower deposition temperature, thicker ATO NL, and
    lower TiOy content in each ATO sublayer can lead to lower leakage current and
    smaller loss tangent at 1 kHz for the capacitors. Higher deposition temperature,
    larger number of ATO in-terface, and higher TiOy content in each ATO sublayer
    are important to obtain higher k values for the ATO NLs. With the increase of
    resistance for the capacitors, the ATO NLs vary from semi-conductors to insulators
    and their k values have a decrease tendency. For most of the capacitors, the capacitances
    reduce with the increment of absolute measurement voltage. There are semi-circular
    shapes for impedance spectra of the capacitors. By fitting them with the equivalent
    circuit, it is observed that with the increase of absolute voltage, both parallel
    resistor and capacitance decrease. The variation of the capacitance is explained
    well by a novel double-Schottky electrode contact model. The formation of super-high
    k values for the semiconducting ATO NLs is possibly attributed to the accumulation
    of charges. '
  description_type: abstract
  lang: eng

## Creator

- name: Jiangwei Liu
  role: author
  orcid: https://orcid.org/0000-0003-2580-7401
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Masayuki Okamura
  role: author
- name: Hisanori Mashiko
  role: author
- name: Masataka Imura
  role: author
  orcid: https://orcid.org/0000-0002-4236-9549
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Ryosuke Kikuchi
  role: author
- name: Michio Suzuka
  role: author
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: MDPI AG

## Managing organization



## Keyword

- subject: super-high dielectric constant
  schema: not_defined
- subject: nanolaminate
  schema: not_defined
- subject: ATO
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Nanomaterials
  issn: '20794991'
  volume: '13'
  issue: '7'
  article_number: '1256'

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: c4de58f7-ce2d-429d-836d-5da0a12d94b4
  filename: nanomaterials-13-01256.pdf
  content_type: application/pdf
  size: 3016372
  md5: 56ab765227f7c4ef504096d43ac17fd0

## Thumbnail

fileset_id: c4de58f7-ce2d-429d-836d-5da0a12d94b4
filename: nanomaterials-13-01256.pdf