@misc{jiangwei2023a, title = {Experimental formation and mechanism study for super-high dielectric constant AlOx/TiOy nanolaminates}, author = {Jiangwei Liu, Masayuki Okamura, Hisanori Mashiko, Masataka Imura, Meiyong Liao, Ryosuke Kikuchi, Michio Suzuka, Yasuo Koide}, publisher = {MDPI AG}, year = {2023-04-02}, keywords = {super-high dielectric constant, nanolaminate, ATO} }