# Surface modification of aluminum on a silicon chip by citric acid treatment

https://mdr.nims.go.jp/datasets/2294a610-7d6e-4f51-8468-d3df319f4746

## Files

- [1-s2.0-S2666845925002120-main.pdf](https://mdr.nims.go.jp/filesets/0fb37f57-ebee-4556-ada7-0ffcd5d9daab/download) ([Detail](https://mdr.nims.go.jp/filesets/0fb37f57-ebee-4556-ada7-0ffcd5d9daab.md))

## Id

2294a610-7d6e-4f51-8468-d3df319f4746

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-08-25T00:32:21.608022Z

## Updated at

2025-08-25T03:30:35.112284Z

## Published at

2025-08-25T03:19:23.269980Z

## Doi



## First published url

https://doi.org/10.1016/j.rsurfi.2025.100625

## Date published

2025-08-18

## Recorded date published

2025-8

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Surface modification of aluminum on a silicon chip by citric acid treatment
  title_type: original
  lang: en

## Description

- description: Aluminum is widely used as a conductive material in the semiconductor
    and electronics fields. However, the inevitable formation of an oxide layer on
    its surface during atmospheric heat treatment accompanying the fabrication process
    increases surface resistivity. This necessitates a surface treatment to mitigate
    the negative effects of the oxide layer. In this study, a silicon chip containing
    aluminum wires was immersed in a 0.1wt% citric acid solution as a simple surface
    treatment technique. In situ electrical current measurements from arrays of aluminum
    wires located on the silicon chip were performed during the treatment. X-ray photoelectron
    spectroscopy and infrared spectroscopy were conducted before and after the treatment.
    The results revealed a significant removal of the contamination/oxide layer formed
    on the chip surface, and the outermost stacked layer on the aluminum surface turned
    hydrophilic (ca. 0.3 Å/min at 50℃), resulting in a considerable decrease in the
    electric resistance around the surface. As a demonstration, a sensor made of Al
    and Au arrays was placed on the silicon chip, and the citric acid treatment helped
    enhance its response to humid air by more than 1000, with the steady current response
    realized in a treatment time of 2–3 min. This promising surface treatment method
    is expected to help enhance the removal of oxide layers formed on metal-based
    components.
  description_type: abstract
  lang: und

## Creator

- name: Moataz Mekawy
  role: author
- name: Kazuya Iida
  role: author
- name: Akitsu Shigetou
  role: author
  orcid: https://orcid.org/0000-0001-7054-3674
- name: Jin Kawakita
  role: author
  orcid: https://orcid.org/0000-0002-4821-4150

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: Aluminum
  schema: not_defined
- subject: Surface treatment
  schema: not_defined
- subject: Citric acid
  schema: not_defined
- subject: Sensor
  schema: not_defined
- subject: Moisture
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc/4.0/

## Other identifier(s)



## Data origin



## Embargo



## Journal

- title: Results in Surfaces and Interfaces
  issn: '26668459'
  volume: '20'
  article_number: '100625'

## Conference



## Related item



## Funding

- identifier: JPJ010717
  funder_name: National Agriculture and Food Research Organisation Bio-oriented Technology
    Research Advancement Institution

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 0fb37f57-ebee-4556-ada7-0ffcd5d9daab
  filename: 1-s2.0-S2666845925002120-main.pdf
  content_type: application/pdf
  size: 6332327
  md5: 472beed3f5b125743ba5c23f734d21eb

## Thumbnail

fileset_id: 0fb37f57-ebee-4556-ada7-0ffcd5d9daab
filename: 1-s2.0-S2666845925002120-main.pdf