# Ultrasensitive and Reliable Diamond MEMS Magnetic Force Sensor with 3D Imaging at Room Temperature

https://mdr.nims.go.jp/datasets/20f8e9cb-da70-48b4-b4a8-0c4189371517

## Files

- [Adv Materials Technologies - 2025 - Zhang - Ultrasensitive and Reliable Diamond MEMS Magnetic Force Sensor with 3D Imaging.pdf](https://mdr.nims.go.jp/filesets/c7155b2c-3750-44db-b1e2-1b6eef03618b/download) ([Detail](https://mdr.nims.go.jp/filesets/c7155b2c-3750-44db-b1e2-1b6eef03618b.md))

## Id

20f8e9cb-da70-48b4-b4a8-0c4189371517

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-07-11T05:00:10.209859Z

## Updated at

2025-07-22T03:30:24.737500Z

## Published at

2025-07-22T03:19:05.590583Z

## Doi



## First published url

https://doi.org/10.1002/admt.202500470

## Date published

2025-05-12

## Recorded date published

2025-8

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Ultrasensitive and Reliable Diamond MEMS Magnetic Force Sensor with 3D Imaging
    at Room Temperature
  title_type: original
  lang: en

## Description

- description: Developing magnetic force sensors with a simple structure, high sensitivity,
    and exceptional reliability at room temperature remains challenging due to frequency
    fluctuations and noise suppression issues. In this work, an ultra-sensitive and
    highly reliable magnetic force sensor is presented by integrating a single-crystal
    diamond (SCD) MEMS resonator with a permanent magnetic particle. The magnetic
    particle serves as the sensing element, enabling precise detection of magnetic
    field gradients under a field bath. The SCD-based MEMS sensor exhibits outstanding
    performance, achieving an ultra-low detectable force of 1.8 × 10−16 N/Hz1/2, a
    high magnetic sensitivity of 0.303%/(mT/mm), and a response time of 98.8 ms in
    the first mode at room temperature. Notably, the resonant frequency fluctuation
    is remarkably low, reaching 7.89 × 10−4 Hz at room temperature, ensuring stable
    and reliable operation. Furthermore, a 3D magnetic force imaging sensor based
    on the SCD platform, capable of visualizing the 3D distribution of magnetic forces
    is demonstrated. This work lays a solid foundation for the advancement of SCD
    MEMS-based magnetic imaging sensors, offering unparalleled sensitivity, reliability,
    and tunable spatial resolution for next-generation magnetic imaging applications.
  description_type: abstract
  lang: eng

## Creator

- name: Zilong Zhang
  role: author
  organization: Graduate School of Engineering, Tohoku University
- name: Keyun Gu
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Zhijian Zhao
  role: author
  organization: Graduate School of Engineering, Tohoku University
- name: Zhengyan Lei
  role: author
  organization: Graduate School of Engineering, Tohoku University
- name: Yi-Hsiu Kao
  role: author
  organization: Graduate School of Engineering, Tohoku University
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Takahito Ono
  role: author
  organization: Graduate School of Engineering, Tohoku University
- name: Masaya Toda
  role: author
  organization: Graduate School of Engineering, Tohoku University

## Contact agent



## Publisher

organization: Wiley

## Managing organization



## Keyword

- subject: Diamond, MEMS, magnetic sensors,
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: ADVANCED MATERIALS TECHNOLOGIES
  issn: 2365709X

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: c7155b2c-3750-44db-b1e2-1b6eef03618b
  filename: Adv Materials Technologies - 2025 - Zhang - Ultrasensitive and Reliable
    Diamond MEMS Magnetic Force Sensor with 3D Imaging.pdf
  content_type: application/pdf
  size: 1934531
  md5: 5e7b4d2d45efb71836e9d2783e7faf62

## Thumbnail

fileset_id: c7155b2c-3750-44db-b1e2-1b6eef03618b
filename: Adv Materials Technologies - 2025 - Zhang - Ultrasensitive and Reliable
  Diamond MEMS Magnetic Force Sensor with 3D Imaging.pdf