# Fabrication of coherent γ-Al2O3/Ga2O3 superlattices on MgAl2O4 substrates

https://mdr.nims.go.jp/datasets/1ebce2e6-dc2d-4558-b4e0-edced3c6e801

## File

- [gamma_SL.docx](https://mdr.nims.go.jp/filesets/918a379a-3d8c-4401-9f12-082b3ee29670/download) ([Detail](https://mdr.nims.go.jp/filesets/918a379a-3d8c-4401-9f12-082b3ee29670.md))

## Id

1ebce2e6-dc2d-4558-b4e0-edced3c6e801

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-11-24T05:06:45.792271Z

## Updated at

2024-01-05T13:11:34.308204Z

## Published at

2023-11-28T04:30:42.484961Z

## Doi

https://doi.org/10.48505/nims.4269

## First published url

https://doi.org/10.7567/1882-0786/ab2196

## Date published

2019-06-01

## Recorded date published

2019-6-1

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Fabrication of coherent γ-Al2O3/Ga2O3 superlattices on MgAl2O4 substrates
  title_type: alternative
  lang: ja
- title: Fabrication of coherent γ-Al2O3/Ga2O3 superlattices on MgAl2O4 substrates
  title_type: original
  lang: en

## Description

- description: We succeeded in fabricating 10-period coherent γ Al2O3/Ga2O3 superlattices
    (SLs) on MgAl2O4 substrates by molecular beam epitaxy. By varying the each layer
    thickness, we tuned the average Al composition (xave) of the coherent SLs from
    0.26 to 0.86, and obtained nearly-lattice-matched SLs to the substrate at xave
    ~ 0.5. The lattice-matched SLs maintained coherent interfaces up to a period length
    of 7.2 nm in spite of a large lattice mismatch between the end members. Our results
    suggest lots of flexibility in designing γ (AlxGa1−x)2O3-based heterostructures
    for future functional heterojunction devices.
  description_type: abstract
  lang: eng

## Creator

- name: Yuji Kato
  role: author
- name: Masataka Imura
  role: author
  orcid: https://orcid.org/0000-0002-4236-9549
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Yoshiko Nakayama
  role: author
  orcid: https://orcid.org/0000-0002-7607-6779
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Masaki Takeguchi
  role: author
  orcid: https://orcid.org/0000-0002-0282-6020
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Takayoshi Oshima
  role: author
  orcid: https://orcid.org/0000-0001-8550-9735
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: IOP Publishing

## Managing organization



## Keyword

- subject: Ga2O3
  schema: not_defined
- subject: Superlattice
  schema: not_defined

## Rights

- description: "© 2019 The Japan Society of Applied Physics \r\n<br>\r\nThis is an
    author-created, un-copyedited version of an article accepted for publication in
    Applied Physics Express, Volume 12, Number 6. IOP Publishing Ltd is not responsible
    for any errors or omissions in this version of the manuscript or\r\nany version
    derived from it. The Version of Record is available online at https://doi.org/10.7567/1882-0786/ab2196."
  identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2019-05-23
end_date: 2020-05-23

## Journal

- title: APPLIED PHYSICS EXPRESS
  issn: '18820778'
  volume: '12'
  issue: '6'
  start_page: 65503
  end_page: 65503

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## Instrument



## Instrument operator



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## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



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## Fileset

- id: 918a379a-3d8c-4401-9f12-082b3ee29670
  filename: gamma_SL.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 2756172
  md5: 57c8a0afad2e82304135a8637aa2ea98

## Thumbnail

fileset_id: 918a379a-3d8c-4401-9f12-082b3ee29670
filename: gamma_SL.docx