# Surface Modification for High Reliability and Reversible Hybrid Interconnection

https://mdr.nims.go.jp/datasets/1d263ca8-2bc6-43a9-8b5c-2431cdb7c10b

## File

- [JAFOE.pdf](https://mdr.nims.go.jp/filesets/c07cb455-ddef-4947-a099-3968305f2ccf/download) ([Detail](https://mdr.nims.go.jp/filesets/c07cb455-ddef-4947-a099-3968305f2ccf.md))

## Id

1d263ca8-2bc6-43a9-8b5c-2431cdb7c10b

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-01-20T01:27:42.820503Z

## Updated at

2026-01-21T00:20:22.790725Z

## Published at

2026-01-21T03:20:40.068639Z

## Doi

https://doi.org/10.48505/nims.6156

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## Date published



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## Resource type

conference_poster

## Manuscript type

na

## Collection



## Title

- title: Surface Modification for High Reliability and Reversible Hybrid Interconnection
  title_type: original
  lang: en

## Description

- description: ナノスケールのエレクトロニクスデバイスから，メートルスケールの構造材料まで，異材を組み合わせた「界面」の構造はマルチスケールフィジックスにより規定され，ハイブリッド材料の性能を左右している．本発表では，スケールや材料をまたいだ汎用性のある手法で材料表面を改質し，高信頼性材料を得るための要素技術開発や事例を紹介した．
  description_type: abstract
  lang: eng

## Creator

- name: Akitsu Shigetou
  role: author
  orcid: https://orcid.org/0000-0001-7054-3674
  organization: National Institute for Materials Science
  department: Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor
    Materials Field/Smart Interface Team

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## Keyword

- subject: Hybrid bonding
  schema: not_defined
- subject: Cu
  schema: not_defined
- subject: Solid state debonding
  schema: not_defined

## Rights

- description: ポスターコピー不可版
  identifier: http://rightsstatements.org/vocab/InC/1.0/

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## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: 2025 Japan-America Frontiers of Engineering Symposium
start_date: 2025-06-01
end_date: 2025-06-04
identifier: https://www.naefrontiers.org/213082/2025-JapanAmerica-Frontiers-of-Engineering-Symposium

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## Measurement method



## Specimen



## Chemical composition



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## Fileset

- id: c07cb455-ddef-4947-a099-3968305f2ccf
  filename: JAFOE.pdf
  content_type: application/pdf
  size: 780976
  md5: 4322d616263f66de28156ecac294371f

## Thumbnail

fileset_id: c07cb455-ddef-4947-a099-3968305f2ccf
filename: JAFOE.pdf