# A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler

https://mdr.nims.go.jp/datasets/1a35d2a8-07df-4800-a16d-2682633ceeca

## File

- [s41377-022-00734-7.pdf](https://mdr.nims.go.jp/filesets/d8471f35-bd4a-44ca-a547-17f024f4c01b/download) ([Detail](https://mdr.nims.go.jp/filesets/d8471f35-bd4a-44ca-a547-17f024f4c01b.md))

## Id

1a35d2a8-07df-4800-a16d-2682633ceeca

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-02-25T06:08:58.258794Z

## Updated at

2025-02-26T03:30:46.629194Z

## Published at

2025-02-26T03:30:46.700997Z

## Doi



## First published url

https://doi.org/10.1038/s41377-022-00734-7

## Date published

2022-03-01

## Recorded date published



## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler
  title_type: original
  lang: en

## Description

- description: The nano-opto-electro-mechanical systems (NOEMS) are a class of hybrid
    solid devices that hold promises in both classical and quan- tum manipulations
    of the interplay between optical, electrical and mechanical degrees of freedom.
    To date, studies of NOEMS using van der Waals (vdW) heterostructures are very
    limited, although vdW materials are known for emerging phenomena such as spin,
    valley, and topological physics. Here, we devise a universal method to easily
    and robustly fabricate vdW heterostructures into an architecture that hosts opto-electro-mechanical
    couplings in one single device. We demonstrated several functionalities, including
    nano-mechanical resonator, vacuum channel diodes, and ultra-fast thermo-radiator,
    using monolithically sculpted graphene NOEMS as a platform. Quality factors of
    mechanical resonances in them are found to exceed 103 at room temperature, while
    Joule heating can be modulated into ultra-fast thermo-radiation with ∼13 ns pulses.
    In the thermionic emission domain, nano vacuum channel diodes with on-off ratios
    of 105 can be achieved, with an emission current density reaching 104 A/m2 . Our
    results suggest that the introduction of the vdW het- erostructure into the NOEMS
    family will be of particular potential for the development of novel lab-on-a-chip
    systems.
  description_type: abstract
  lang: und

## Creator

- name: Tongyao Zhang
  role: author
- name: Hanwen Wang
  role: author
- name: Xiuxin Xia
  role: author
- name: Ning Yan
  role: author
- name: Xuanzhe Sha
  role: author
- name: Jinqiang Huang
  role: author
- name: Kenji Watanabe
  role: author
  orcid: https://orcid.org/0000-0003-3701-8119
  organization: National Institute for Materials Science
- name: Takashi Taniguchi
  role: author
  orcid: https://orcid.org/0000-0002-1467-3105
  organization: National Institute for Materials Science
- name: Mengjian Zhu
  role: author
- name: Lei Wang
  role: author
- name: Jiantou Gao
  role: author
- name: Xilong Liang
  role: author
- name: Chengbing Qin
  role: author
- name: Liantuan Xiao
  role: author
- name: Dongming Sun
  role: author
- name: Jing Zhang
  role: author
- name: Zheng Han
  role: author
- name: Xiaoxi Li
  role: author

## Contact agent



## Publisher

organization: Springer Science and Business Media LLC

## Managing organization



## Keyword

- subject: Nano-opto-electro-mechanical systems
  schema: not_defined
- subject: van der Waals heterostructures
  schema: not_defined
- subject: graphene
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin



## Embargo



## Journal

- title: 'Light: Science & Applications'
  issn: '20477538'
  volume: '11'
  issue: '1'
  article_number: '48'

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## Specimen



## Chemical composition



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## Fileset

- id: d8471f35-bd4a-44ca-a547-17f024f4c01b
  filename: s41377-022-00734-7.pdf
  content_type: application/pdf
  size: 2647803
  md5: 6f740517d4397e6308305d012bd81333

## Thumbnail

fileset_id: d8471f35-bd4a-44ca-a547-17f024f4c01b
filename: s41377-022-00734-7.pdf