@misc{yoshikawa2019a,
  title = {Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam},
  author = {Yoshikawa, Hideki, Ogiwara, Toshiya, Nagata, Takahiro},
  publisher = {Surface Analysis Society of Japan},
  year = {2019-03-07},
  keywords = {Auger Depth Profiling analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam}
}