@misc{kuan-cheng2026a,
  title = {Patternable laser-oxidized Ta2O5 dielectric and TaS2 contact for optimizing subthreshold swing of MoS2 field-effect transistors},
  author = {Kuan-Cheng Lu, Pen-Yuan Shih, Pin-Hsien Lin, Shih-Hao Wu, Kimitoshi Kono, Wen-Bin Jian, Yu-Han Lin, Yo-Yao Ho, Ching-Hwa Ho, Shin-Yuan Wang, Chao-Hsin Chien, Ching-Yu Chiang, Shu-Jui Chang, Yu-Che Huang, Kenji Watanabe, Takashi Taniguchi, Kazuhito Tsukagoshi, Chenming Hu},
  publisher = {Elsevier BV},
  year = {2026-02-24},
  keywords = {Ta2O5, TaS2, subthreshold swing, MoS2, field-effect transistors}
}