# Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation in Single-Crystal Diamond MEMS

https://mdr.nims.go.jp/datasets/0fda7930-67ea-40d3-ae60-27bcc3de42f7

## File

- [Abstract Oxygen-termination effect R.doc](https://mdr.nims.go.jp/filesets/c87d2c3f-5290-4c87-b586-92faf294aa79/download) ([Detail](https://mdr.nims.go.jp/filesets/c87d2c3f-5290-4c87-b586-92faf294aa79.md))

## Id

0fda7930-67ea-40d3-ae60-27bcc3de42f7

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-04-10T02:11:23.455382Z

## Updated at

2025-04-11T23:30:28.443599Z

## Published at

2025-04-11T11:23:04.101379Z

## Doi

https://doi.org/10.48505/nims.5419

## First published url



## Date published



## Recorded date published



## Resource type

conference_presentation

## Manuscript type

na

## Collection



## Title

- title: Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation
    in Single-Crystal Diamond MEMS
  title_type: original
  lang: en

## Description

- description: In this work, we clarify the effect of oxygen terminal surface adsorption
    characteristic on the resonance behavior of SCD MEMS resonator. We examine the
    Q factors and resonance frequencies of the SCD MEMS resonators with the defective
    layer removed in a high vacuum chamber by in-situ heating and cooling. Based on
    ultrahigh stability of resonance characteristic of SCD resonator at room temperature
    (RT) and high temperature (from 313 K to 933 K), the Q factors are significantly
    improved after heating processing. The Q factor of the 80 μm-long cantilever is
    improved from 1.0x105 to 1.2x105 and the resonance frequency increases, as shown
    in Fig.1. We clarify that the desorption of the absorbates on the oxygen-terminated
    diamond surface induces the lower surface energy dissipation and higher Q factor.
    Hence, appropriate surface treatments are necessary for the development of MEMS
    devices with low energy dissipation and high sensitivity.
  description_type: abstract
  lang: eng

## Creator

- name: Keyun Gu
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Zilong Zhang
  role: author
  orcid: https://orcid.org/0000-0002-9759-9253
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Wen Zhao
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Guo Chen
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Jian Huang
  role: author
  organization: China University of Geosciences
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

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## Keyword

- subject: ダイヤモンド
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

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## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: 第85回応用物理学会秋季学術講演会
start_date: 2024-09-16
end_date: 2024-09-20
identifier: https://meeting.jsap.or.jp/archive/jsap2024a/

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## Fileset

- id: c87d2c3f-5290-4c87-b586-92faf294aa79
  filename: Abstract Oxygen-termination effect R.doc
  content_type: application/msword
  size: 59904
  md5: 9c58dd9c5c3d0a447cc154c6e2e475a5

## Thumbnail

fileset_id: c87d2c3f-5290-4c87-b586-92faf294aa79
filename: Abstract Oxygen-termination effect R.doc