@misc{keyun-a,
  title = {Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation in Single-Crystal Diamond MEMS},
  author = {Keyun Gu, Zilong Zhang, Wen Zhao, Guo Chen, Jian Huang, Satoshi Koizumi, Yasuo Koide, Meiyong Liao},
  publisher = {},
  year = {},
  keywords = {ダイヤモンド, MEMS}
}