# Smart-Cut Method for Diamond NEMS Fabrication by Efficient Oxygen Etching

https://mdr.nims.go.jp/datasets/0d99c7ab-3515-4826-8be2-d92f095d5c26

## File

- [2024.2 STAC-D2MatE.pdf](https://mdr.nims.go.jp/filesets/c50bf003-cdbe-42ec-b163-2557ba688ca2/download) ([Detail](https://mdr.nims.go.jp/filesets/c50bf003-cdbe-42ec-b163-2557ba688ca2.md))

## Id

0d99c7ab-3515-4826-8be2-d92f095d5c26

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-10-10T10:07:28.831530Z

## Updated at

2026-11-04T01:30:56.338183Z

## Published at

2026-11-04T03:31:57.979655Z

## Doi

https://doi.org/10.48505/nims.8695

## First published url



## Date published



## Recorded date published



## Resource type

conference_poster

## Manuscript type

na

## Collection



## Title

- title: Smart-Cut Method for Diamond NEMS Fabrication by Efficient Oxygen Etching
  title_type: original
  lang: en

## Description

- description: In this work, we proposed a smart-cut technique for SCD NEMS fabrication
    through oxygen etching in high temperatures. These cantilevers’ resonance frequency
    and length closely follow the law provided by Euler-Bernoulli beam theory at every
    turn. The etching treatments result in a decrease in the resonance frequency of
    the diamond cantilevers due to the reduction in thickness. The reduced thickness
    of the diamond cantilevers can be determined through the resonance frequency.
    It was noted that there was a marginal reduction in thickness before 600℃, whereas
    a significant decrease was observed at 685℃. Considering both top and bottom sides
    of the cantilevers, the average etching rate of diamond is assessed to be approximately
    5 nm/h at 685℃ in pure oxygen environment. Following each etching, the surface
    morphology and crystal quality of diamond were further investigated by atomic
    force microscopy (AFM), 3D laser scanning microscope, and Raman. This study presents
    a smart-cut strategy for fabricating diamond NEMS by the atomic-scale etching
    of SCD cantilevers in an oxygen atmosphere.
  description_type: abstract
  lang: eng

## Creator

- name: Guo Chen
  role: author
  orcid: https://orcid.org/0009-0004-9263-5616
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Zilong Zhang
  role: author
  orcid: https://orcid.org/0000-0002-9759-9253
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Keyun Gu
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Liwen Sang
  role: author
  orcid: https://orcid.org/0000-0003-0946-1025
  organization: National Institute for Materials Science
  department: Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials
    Field/Thin Film Electronics Group
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials
- name: Zhaohui Huang
  role: author
  organization: China University of Geosciences
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

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## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: The International Conference on the Science and Technology for Advanced Ceramics
  (STAC) 2024
start_date: 2024-02-29
end_date: 2024-02-29
identifier: http://conf.msl.titech.ac.jp/Conference5/STAC_D2MatE/wiki/

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## Fileset

- id: c50bf003-cdbe-42ec-b163-2557ba688ca2
  filename: 2024.2 STAC-D2MatE.pdf
  content_type: application/pdf
  size: 288124
  md5: cdca53eedcbff243b5c301ce9872f675

## Thumbnail

fileset_id: c50bf003-cdbe-42ec-b163-2557ba688ca2
filename: 2024.2 STAC-D2MatE.pdf