@article{nabatame,
  title = {Characteristics of β-Ga2O3/Al2O3/Pt capacitors with a Ga2O3 surface modified using the dummy-SiO2 process},
  author = {Toshihide Nabatame, Yoshihiro Irokawa, Tomomi Sawada, Hiromi Miura, Manami Miyamoto, Takashi Onaya, Yasuo Koide, Kazuhito Tsukagoshi},
  publisher = {The Electrochemical Society},
  year = {2026},
  keywords = {Ga2O3, atomic layer deposition, dummy-SiO2, Al2O3, positive bias stress}
}