# Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering

https://mdr.nims.go.jp/datasets/061f3c47-1f7f-4a0f-8345-c925455c9ac1

## File

- [表面科学_17_1996_758.pdf](https://mdr.nims.go.jp/filesets/6484724e-c9f8-4259-b4d4-153f173f849b/download) ([Detail](https://mdr.nims.go.jp/filesets/6484724e-c9f8-4259-b4d4-153f173f849b.md))

## Id

061f3c47-1f7f-4a0f-8345-c925455c9ac1

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2021-10-13T13:29:41.688712Z

## Updated at

2022-10-02T16:24:02.154544Z

## Published at

2021-11-16T10:30:53.969780Z

## Doi



## First published url

https://doi.org/10.1380/jsssj.17.758

## Date published

2011-06-10

## Recorded date published

1996

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy,
    Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
  title_type: original
  lang: en

## Description

- description: We have conducted Auger depth profiling analyses of InP/GaInAsP multilayer
    specimens, in which the surface roughness was caused by the argon ion sputtering.
    We have, then, carried out the quantitative evaluation of the surface roughness
    using the distribution of the each pixel height taken by an atomic force microscope.
    The obtained histograms of surface roughness were used to calculate the resolution
    function together with the functions of electron escape depth and atomic mixing
    (Hofmann's MRI model). We also compared the resulting resolution function with
    the one obtained by the depth profiles measured. In this convolution calculation,
    we have assumed that the atomic mixing layer thickness was 2 nm and the information
    depth was 0.75 nm. The resulting resolution function was in excellent agreement
    with the one obtained from Auger depth profile. Therefore, we conclude that the
    distribution of the height of each pixel taken by AFM corresponds to the functions
    of surface roughness of the depth resolution function on the AES depth profile
    with sample cooling method.
  description_type: abstract
  lang: en

## Creator

- name: OGIWARA, Toshiya
  role: author
  orcid: https://orcid.org/0000-0002-7376-6571
- name: TANUMA, Shigeo
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941

## Contact agent



## Publisher

organization: Surface Science Society of Japan

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## Keyword

- subject: depth resolution function
  schema: not_defined
- subject: InP/GaInAsP multilayer specimens
  schema: not_defined
- subject: Auger depth profiling analysis
  schema: not_defined
- subject: surface roughness
  schema: not_defined
- subject: atomic force microscope
  schema: not_defined

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## Fileset

- id: 6484724e-c9f8-4259-b4d4-153f173f849b
  filename: 表面科学_17_1996_758.pdf
  content_type: application/pdf
  size: 7483183
  md5: fb85b2210125bee8ad547eb328450855

## Thumbnail

fileset_id: 6484724e-c9f8-4259-b4d4-153f173f849b
filename: 表面科学_17_1996_758.pdf