# XPS spectral data for p- and n-type Si wafers with various resistivities acquired at SPring-8 BL15

https://mdr.nims.go.jp/datasets/056286f2-bb8b-4892-8208-297df128bc89

## File

- [Sumiya-Si-XPS-SP8BL15.zip](https://mdr.nims.go.jp/filesets/b231b6eb-c5dc-4ad9-9317-e976f4274977/download) ([Detail](https://mdr.nims.go.jp/filesets/b231b6eb-c5dc-4ad9-9317-e976f4274977.md))

## Id

056286f2-bb8b-4892-8208-297df128bc89

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-05-21T05:07:15.910535Z

## Updated at

2024-05-23T23:30:24.201192Z

## Published at

2024-05-23T23:30:24.727082Z

## Doi

https://doi.org/10.48505/nims.4513

## First published url

https://dice.nims.go.jp/services/RDE/

## Date published



## Recorded date published



## Resource type

dataset

## Manuscript type

na

## Collection



## Title

- title: 電気伝導度の異なるp型/n型 Siウエハーの価電子帯を含むXPSデータ (SPring-8 BL15)
  title_type: alternative
  lang: ja
- title: XPS spectral data for p- and n-type Si wafers with various resistivities
    acquired at SPring-8 BL15
  title_type: original
  lang: en

## Description

- description: "Siウェハーおよび測定条件の違いによるXPSスペクトルの変化を測定したXPSスペクトルデータセット。SPring-8 BL15で測定。「試料名、抵抗率、X線アナライザー角度、ID」の構造でフォルダ分けされている（ただしAuでは「試料名、X線アナライザー角度、ID」）。本データセットは当初
    NIMS RDE (Research Data Express) に登録されたものを移設したものであり、RDEによるメタデータのJSONなどを含む。 \r\nXPS
    spectral data set measured at SPring-8 BL15, measuring changes in XPS spectra
    due to differences in Si wafers and measurement conditions. Organized into folders
    by sample name, electrical resistivity, x-ray analyzer angle, and ID (except for
    Au data which are organized by sample name, x-ray analyzer angle, and ID). This
    work is transferred from a dataset initially deposited to NIMS RDE (Research Data
    Express), and contains metadata JSON created by RDE."
  description_type: abstract
  lang: en

## Creator

- name: SUMIYA, Masatomo
  role: author
  orcid: https://orcid.org/0000-0003-0960-3812
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26

## Contact agent

- name: SUMIYA, Masatomo
  email: SUMIYA.Masatomo@nims.go.jp
  orcid: https://orcid.org/0000-0003-0960-3812
  organization: National Institute for Materials Science
  ror: https://ror.org/

## Publisher

organization: National Institute for Materials Science
ror: https://ror.org/026v1ze26

## Managing organization



## Keyword

- subject: XPS
  schema: not_defined
- subject: SPring-8 BL15
  schema: not_defined
- subject: Si
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: experiment

## Embargo



## Journal



## Conference



## Related item



## Funding



## Instrument

- name: XPS SPring-8 BL15

## Instrument operator



## Instrument managing organization



## Measurement method

- category_vocabulary: http://matvoc.nims.go.jp/entity/Q31

## Specimen

- name: Si wafer
  material_type_vocabulary: http://matvoc.nims.go.jp/entity/Q47
- name: Au

## Chemical composition

- category_vocabulary: http://matvoc.nims.go.jp/entity/Q47
  description: Si

## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: b231b6eb-c5dc-4ad9-9317-e976f4274977
  filename: Sumiya-Si-XPS-SP8BL15.zip
  content_type: application/zip
  size: 10311276
  md5: 0014ddc2ba9f2db7e0f5299cbfbb8f3c

## Thumbnail

fileset_id: b231b6eb-c5dc-4ad9-9317-e976f4274977
filename: Sumiya-Si-XPS-SP8BL15.zip